Total properties:
11
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2008
|
Application #:
|
10765613
|
Filing Dt:
|
01/27/2004
|
Publication #:
|
|
Pub Dt:
|
11/04/2004
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS USING ONE OR MORE PIVOTABLE LOAD-AND-UNLOAD CUPS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/29/2007
|
Application #:
|
10829593
|
Filing Dt:
|
04/21/2004
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS USING ONE OR MORE POLISHING SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2008
|
Application #:
|
11208158
|
Filing Dt:
|
08/18/2005
|
Publication #:
|
|
Pub Dt:
|
03/02/2006
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS USING PIVOTABLE LOAD/UNLOAD CUPS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/03/2007
|
Application #:
|
11270270
|
Filing Dt:
|
11/08/2005
|
Publication #:
|
|
Pub Dt:
|
05/11/2006
| | | | |
Title:
|
METHODS FOR FABRICATING ONE OR MORE METAL DAMASCENE STRUCTURES IN A SEMICONDUCTOR WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/09/2010
|
Application #:
|
11517903
|
Filing Dt:
|
09/08/2006
|
Publication #:
|
|
Pub Dt:
|
03/15/2007
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING OBJECTS USING OBJECT CLEANERS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2008
|
Application #:
|
11680588
|
Filing Dt:
|
02/28/2007
|
Publication #:
|
|
Pub Dt:
|
09/06/2007
| | | | |
Title:
|
POLISHING HEAD FOR POLISHING SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/2009
|
Application #:
|
11738324
|
Filing Dt:
|
04/20/2007
|
Publication #:
|
|
Pub Dt:
|
08/16/2007
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS USING ONE OR MORE POLISHING SURFACES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11743114
|
Filing Dt:
|
05/01/2007
|
Publication #:
|
|
Pub Dt:
|
08/30/2007
| | | | |
Title:
|
METHODS FOR FABRICATING ONE OR MORE METAL DAMASCENE STRUCTURES IN A SEMICONDUCTOR WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2010
|
Application #:
|
11762007
|
Filing Dt:
|
06/12/2007
|
Publication #:
|
|
Pub Dt:
|
02/28/2008
| | | | |
Title:
|
CONFIGURABLE POLISHING APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11774532
|
Filing Dt:
|
07/06/2007
|
Publication #:
|
|
Pub Dt:
|
01/17/2008
| | | | |
Title:
|
POLISHING HEAD FOR POLISHING SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11835321
|
Filing Dt:
|
08/07/2007
|
Publication #:
|
|
Pub Dt:
|
02/14/2008
| | | | |
Title:
|
APPARATUS AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS
|
|