Patent Assignment Details
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Reel/Frame: | 008101/0248 | |
| Pages: | 2 |
| | Recorded: | 03/27/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08587906
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Filing Dt:
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01/16/1996
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Title:
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MULTI-CATHODE ELECTRON BEAM PLASMA ETCHER
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Assignees
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SAN 56-1, SHILLIM-DONG |
KWANAK-KU, SEOUL 151-742, KOREA, REPUBLIC OF |
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SAN 94, WOLLYANG-RI, UMBONG-MYON, ASAN-KUN, |
CHUNGCHONGNAMDO 337-860, KOREA, REPUBLIC OF |
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Correspondence name and address
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DAVID S. SAFRAN
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2010 CORPORATE RIDGE, SUITE 600
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MCLEAN, VA 22102
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