Total properties:
34
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09833902
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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X-RAY REFLECTOMETER
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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09937609
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Filing Dt:
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01/28/2002
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Title:
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METHOD AND APPARATUS FOR PROLONGING THE LIFE OF AN X-RAY TARGET
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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10004785
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Filing Dt:
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12/07/2001
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Publication #:
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Pub Dt:
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06/12/2003
| | | | |
Title:
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X-RAY TOPOGRAPHIC SYSTEM
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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10077125
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Filing Dt:
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02/14/2002
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Publication #:
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Pub Dt:
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10/17/2002
| | | | |
Title:
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PULSED X-RAY REFLECTOMETER
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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10078640
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Filing Dt:
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02/19/2002
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Publication #:
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Pub Dt:
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08/21/2003
| | | | |
Title:
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DUAL-WAVELENGTH X-RAY REFLECTOMETRY
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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10300504
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Filing Dt:
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11/20/2002
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Publication #:
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Pub Dt:
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04/17/2003
| | | | |
Title:
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X-RAY REFLECTOMETER
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10313280
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
Title:
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BEAM CENTERING AND ANGLE CALIBRATION FOR X-RAY REFLECTOMETRY
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10364883
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Filing Dt:
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02/12/2003
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Publication #:
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Pub Dt:
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08/12/2004
| | | | |
Title:
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X-RAY REFLECTOMETRY WITH SMALL-ANGLE SCATTERING MEASUREMENT
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10627863
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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05/13/2004
| | | | |
Title:
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MULTI-FOIL OPTIC
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10635365
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Filing Dt:
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08/06/2003
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Publication #:
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Pub Dt:
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02/12/2004
| | | | |
Title:
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X-RAY REFLECTOMETER
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10673996
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Filing Dt:
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09/29/2003
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Publication #:
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Pub Dt:
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03/31/2005
| | | | |
Title:
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OPTICAL ALIGNMENT OF X-RAY MICROANALYZERS
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10689314
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Filing Dt:
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10/20/2003
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Publication #:
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Pub Dt:
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07/08/2004
| | | | |
Title:
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X-RAY REFLECTOMETRY OF THIN FILM LAYERS WITH ENHANCED ACCURACY
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|
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Patent #:
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|
Issue Dt:
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04/25/2006
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Application #:
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10702413
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Filing Dt:
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11/05/2003
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Publication #:
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Pub Dt:
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05/05/2005
| | | | |
Title:
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X-RAY SCATTERING WITH A POLYCHROMATIC SOURCE
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Patent #:
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|
Issue Dt:
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06/14/2005
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Application #:
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10761023
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Filing Dt:
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01/20/2004
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Publication #:
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Pub Dt:
|
08/05/2004
| | | | |
Title:
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DUAL-WAVELENGTH X-RAY MONOCHROMATOR
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|
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Patent #:
|
|
Issue Dt:
|
06/27/2006
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Application #:
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10902177
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Filing Dt:
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07/30/2004
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Publication #:
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|
Pub Dt:
|
02/02/2006
| | | | |
Title:
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ENHANCEMENT OF X-RAY REFLECTOMETRY BY MEASUREMENT OF DIFFUSE REFLECTIONS
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|
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Patent #:
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|
Issue Dt:
|
10/10/2006
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Application #:
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10946426
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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COMBINED X-RAY REFLECTOMETER AND DIFFRACTOMETER
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|
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Patent #:
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|
Issue Dt:
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01/06/2009
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Application #:
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11000044
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Filing Dt:
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12/01/2004
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Publication #:
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Pub Dt:
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06/01/2006
| | | | |
Title:
|
CALIBRATION OF X-RAY REFLECTOMETRY SYSTEM
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|
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Patent #:
|
|
Issue Dt:
|
07/11/2006
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Application #:
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11000053
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Filing Dt:
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12/01/2004
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Publication #:
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|
Pub Dt:
|
06/01/2006
| | | | |
Title:
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X-RAY APPARATUS WITH DUAL MONOCHROMATORS
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|
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Patent #:
|
|
Issue Dt:
|
09/19/2006
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Application #:
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11018352
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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06/22/2006
| | | | |
Title:
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MEASUREMENT OF CRITICAL DIMENSIONS USING X-RAY DIFFRACTION IN REFLECTION MODE
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Patent #:
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|
Issue Dt:
|
09/05/2006
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Application #:
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11065737
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Filing Dt:
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02/24/2005
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Publication #:
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Pub Dt:
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08/24/2006
| | | | |
Title:
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MATERIAL ANALYSIS USING MULTIPLE X-RAY REFLECTOMETRY MODELS
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|
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Patent #:
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|
Issue Dt:
|
07/17/2007
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Application #:
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11103071
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Filing Dt:
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04/11/2005
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Publication #:
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Pub Dt:
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10/12/2006
| | | | |
Title:
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DETECTION OF DISHING AND TILTING USING X-RAY FLUORESCENCE
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|
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Patent #:
|
|
Issue Dt:
|
09/26/2006
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Application #:
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11181746
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Filing Dt:
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07/15/2005
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Title:
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ENHANCING RESOLUTION OF X-RAY MEASUREMENTS BY SAMPLE MOTION
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|
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Patent #:
|
|
Issue Dt:
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06/23/2009
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Application #:
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11200857
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Filing Dt:
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08/10/2005
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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MULTIFUNCTION X-RAY ANALYSIS SYSTEM
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|
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Patent #:
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|
Issue Dt:
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10/31/2006
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Application #:
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11297837
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Filing Dt:
|
12/07/2005
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Publication #:
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|
Pub Dt:
|
07/13/2006
| | | | |
Title:
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X-RAY REFLECTOMETRY OF THIN FILM LAYERS WITH ENHANCED ACCURACY
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|
|
Patent #:
|
|
Issue Dt:
|
01/27/2009
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Application #:
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11389490
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Filing Dt:
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03/27/2006
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Publication #:
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|
Pub Dt:
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09/27/2007
| | | | |
Title:
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OVERLAY METROLOGY USING X-RAYS
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|
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Patent #:
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|
Issue Dt:
|
06/12/2007
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Application #:
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11396719
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Filing Dt:
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04/04/2006
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Publication #:
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|
Pub Dt:
|
08/17/2006
| | | | |
Title:
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EFFICIENT MEASUREMENT OF DIFFUSE X-RAY REFLECTIONS
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|
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Patent #:
|
|
Issue Dt:
|
01/27/2009
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Application #:
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11487433
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Filing Dt:
|
07/17/2006
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Publication #:
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|
Pub Dt:
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12/07/2006
| | | | |
Title:
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MEASUREMENT OF PROPERTIES OF THIN FILMS ON SIDEWALLS
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|
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Patent #:
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|
Issue Dt:
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07/29/2008
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Application #:
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11503979
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Filing Dt:
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08/15/2006
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Publication #:
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Pub Dt:
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02/21/2008
| | | | |
Title:
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CONTROL OF X-RAY BEAM SPOT SIZE
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Patent #:
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|
Issue Dt:
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11/18/2008
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Application #:
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11822231
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Filing Dt:
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07/03/2007
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Publication #:
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Pub Dt:
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02/21/2008
| | | | |
Title:
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CONTROL OF X-RAY BEAM SPOT SIZE
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|
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Patent #:
|
|
Issue Dt:
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10/13/2009
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Application #:
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11892005
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Filing Dt:
|
08/17/2007
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Publication #:
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|
Pub Dt:
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12/13/2007
| | | | |
Title:
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TARGET ALIGNMENT FOR X-RAY SCATTERING MEASUREMENTS
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|
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Patent #:
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|
Issue Dt:
|
03/16/2010
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Application #:
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11896909
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Filing Dt:
|
09/06/2007
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Publication #:
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Pub Dt:
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03/12/2009
| | | | |
Title:
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X-RAY MEASUREMENT OF PROPERTIES OF NANO-PARTICLES
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|
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Patent #:
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|
Issue Dt:
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01/26/2010
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Application #:
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12003215
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Filing Dt:
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12/20/2007
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Publication #:
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|
Pub Dt:
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07/03/2008
| | | | |
Title:
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INSPECTION OF SMALL FEATURES USING X-RAY FLUORESCENCE
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|
|
Patent #:
|
|
Issue Dt:
|
01/19/2010
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Application #:
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12232259
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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03/19/2009
| | | | |
Title:
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AUTOMATED SELECTION OF X-RAY REFLECTOMETRY MEASUREMENT LOCATIONS
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|
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Patent #:
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|
Issue Dt:
|
09/28/2010
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Application #:
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12272050
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Filing Dt:
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11/17/2008
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Publication #:
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Pub Dt:
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03/19/2009
| | | | |
Title:
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ACCURATE MEASUREMENT OF LAYER DIMENSIONS USING XRF
|
|