Patent Assignment Details
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| Reel/Frame: | 013353/0253 | |
| Pages: | 3 |
| | Recorded: | 10/03/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10195198
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Filing Dt:
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07/15/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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INTRINSIC BIREFRINGENCE COMPENSATION FOR BELOW 200 NANOMETER WAVELENGTH OPTICAL LITHOGRAPHY COMPONENTS WITH CUBIC CRYSTALLINE STRUCTURES
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Correspondence name and address
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EUGENE STEPHENS & ASSOCIATES
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THOMAS B. RYAN
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56 WINDSOR STREET
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ROCHESTER, NY 14605
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