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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:031911/0254   Pages: 4
Recorded: 01/02/2014
Conveyance: CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Total properties: 32
1
Patent #:
Issue Dt:
07/27/2004
Application #:
09727530
Filing Dt:
11/28/2000
Title:
SYSTEM AND METHOD FOR REAL-TIME LIBRARY GENERATION OF GRATING PROFILES
2
Patent #:
Issue Dt:
07/08/2003
Application #:
09727531
Filing Dt:
11/28/2000
Title:
CLUSTERING FOR DATA COMPRESSION
3
Patent #:
Issue Dt:
10/21/2003
Application #:
09737705
Filing Dt:
12/14/2000
Publication #:
Pub Dt:
12/12/2002
Title:
SYSTEM AND METHOD FOR GRATING PROFILE CLASSIFICATION
4
Patent #:
Issue Dt:
05/10/2005
Application #:
09770997
Filing Dt:
01/25/2001
Publication #:
Pub Dt:
03/21/2002
Title:
CACHING OF INTRA-LAYER CALCULATIONS FOR RAPID RIGOROUS COUPLED-WAVE ANALYSES
5
Patent #:
Issue Dt:
08/13/2002
Application #:
09772148
Filing Dt:
01/29/2001
Publication #:
Pub Dt:
09/19/2002
Title:
METHOD AND APPARATUS FOR THE DETERMINATION OF MASK RULES USING SCATTEROMETRY
6
Patent #:
Issue Dt:
03/02/2004
Application #:
09794686
Filing Dt:
02/27/2001
Publication #:
Pub Dt:
09/26/2002
Title:
GRATING TEST PATTERNS AND METHODS FOR OVERLAY METROLOGY
7
Patent #:
Issue Dt:
09/13/2005
Application #:
09907488
Filing Dt:
07/16/2001
Publication #:
Pub Dt:
03/21/2002
Title:
GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
8
Patent #:
Issue Dt:
08/31/2004
Application #:
09923578
Filing Dt:
08/06/2001
Publication #:
Pub Dt:
02/06/2003
Title:
METHOD AND SYSTEM OF DYNAMIC LEARNING THROUGH A REGRESSION-BASED LIBRARY GENERATION PROCESS
9
Patent #:
Issue Dt:
12/21/2004
Application #:
10004495
Filing Dt:
10/23/2001
Title:
SYSTEM AND METHOD FOR EFFICIENT SIMULATION OF REFLECTOMETRY RESPONSE FROM TWO-DIMENSIONAL GRATING STRUCTURES
10
Patent #:
Issue Dt:
08/19/2003
Application #:
10007124
Filing Dt:
12/04/2001
Publication #:
Pub Dt:
06/05/2003
Title:
OPTICAL PROFILOMETRY OF ADDITIONAL-MATERIAL DEVIATIONS IN A PERIODIC GRATING
11
Patent #:
Issue Dt:
08/19/2003
Application #:
10022035
Filing Dt:
12/13/2001
Publication #:
Pub Dt:
08/14/2003
Title:
MEASUREMENT OF METAL ELECTROPLATING AND SEED LAYER THICKNESS AND PROFILE
12
Patent #:
Issue Dt:
06/01/2004
Application #:
10035925
Filing Dt:
10/22/2001
Publication #:
Pub Dt:
10/16/2003
Title:
BALANCING PLANARIZATION OF LAYERS AND THE EFFECT OF UNDERLYING STRUCTURE ON THE METROLOGY SIGNAL
13
Patent #:
Issue Dt:
04/18/2006
Application #:
10051830
Filing Dt:
01/16/2002
Publication #:
Pub Dt:
10/23/2003
Title:
GENERATING A LIBRARY OF SIMULATED-DIFFRACTION SIGNALS AND HYPOTHETICAL PROFILES OF PERIODIC GRATINGS
14
Patent #:
Issue Dt:
08/03/2004
Application #:
10066555
Filing Dt:
01/31/2002
Publication #:
Pub Dt:
11/13/2003
Title:
OVERLAY MEASUREMENTS USING PERIODIC GRATINGS
15
Patent #:
Issue Dt:
08/19/2003
Application #:
10075904
Filing Dt:
02/12/2002
Title:
PROFILE REFINEMENT FOR INTEGRATED CIRCUIT METROLOGY
16
Patent #:
Issue Dt:
11/14/2006
Application #:
10087069
Filing Dt:
02/28/2002
Publication #:
Pub Dt:
08/28/2003
Title:
GENERATION AND USE OF INTEGRATED CIRCUIT PROFILE-BASED SIMULATION INFORMATION
17
Patent #:
Issue Dt:
04/13/2004
Application #:
10108818
Filing Dt:
03/26/2002
Publication #:
Pub Dt:
10/02/2003
Title:
METROLOGY HARDWARE SPECIFICATION USING A HARDWARE SIMULATOR
18
Patent #:
Issue Dt:
09/14/2004
Application #:
10109955
Filing Dt:
03/29/2002
Publication #:
Pub Dt:
10/02/2003
Title:
METROLOGY DIFFRACTION SIGNAL ADAPTATION FOR TOOL-TO-TOOL MATCHING
19
Patent #:
Issue Dt:
11/11/2003
Application #:
10137200
Filing Dt:
04/30/2002
Publication #:
Pub Dt:
10/30/2003
Title:
COMBINED OPTICAL PROFILOMETRY AND PROJECTION MICROSCOPY OF INTEGRATED CIRCUIT STRUCTURES
20
Patent #:
Issue Dt:
10/12/2004
Application #:
10138903
Filing Dt:
05/02/2002
Publication #:
Pub Dt:
11/06/2003
Title:
OVERLAY MEASUREMENTS USING ZERO-ORDER CROSS POLARIZATION MEASUREMENTS
21
Patent #:
Issue Dt:
05/08/2007
Application #:
10162516
Filing Dt:
06/03/2002
Publication #:
Pub Dt:
12/04/2003
Title:
SELECTION OF WAVELENGTHS FOR INTEGRATED CIRCUIT OPTICAL METROLOGY
22
Patent #:
Issue Dt:
08/10/2004
Application #:
10175207
Filing Dt:
06/18/2002
Publication #:
Pub Dt:
12/18/2003
Title:
OPTICAL METROLOGY OF SINGLE FEATURES
23
Patent #:
Issue Dt:
08/24/2004
Application #:
10187258
Filing Dt:
06/28/2002
Publication #:
Pub Dt:
01/01/2004
Title:
SINGLE PASS LITHOGRAPHY OVERLAY TECHNIQUE
24
Patent #:
Issue Dt:
02/12/2008
Application #:
10206491
Filing Dt:
07/25/2002
Publication #:
Pub Dt:
01/29/2004
Title:
MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
25
Patent #:
Issue Dt:
02/08/2005
Application #:
10213485
Filing Dt:
08/06/2002
Publication #:
Pub Dt:
10/02/2003
Title:
METROLOGY HARDWARE ADAPTATION WITH UNIVERSAL LIBRARY
26
Patent #:
Issue Dt:
01/11/2005
Application #:
10228692
Filing Dt:
08/26/2002
Publication #:
Pub Dt:
02/26/2004
Title:
INTEGRATED CIRCUIT PROFILE VALUE DETERMINATION
27
Patent #:
Issue Dt:
08/15/2006
Application #:
10397631
Filing Dt:
03/25/2003
Publication #:
Pub Dt:
01/29/2004
Title:
OPTIMIZED MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
28
Patent #:
Issue Dt:
08/25/2009
Application #:
11595358
Filing Dt:
11/09/2006
Publication #:
Pub Dt:
05/24/2007
Title:
GENERATION AND USE OF INTEGRATED CIRCUIT PROFILE-BASED SIMULATION INFORMATION
29
Patent #:
Issue Dt:
01/06/2009
Application #:
11788735
Filing Dt:
04/20/2007
Publication #:
Pub Dt:
08/23/2007
Title:
SELECTION OF WAVELENGTHS FOR INTEGRATED CIRCUIT OPTICAL METROLOGY
30
Patent #:
Issue Dt:
09/22/2009
Application #:
11866408
Filing Dt:
10/02/2007
Publication #:
Pub Dt:
10/09/2008
Title:
GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
31
Patent #:
Issue Dt:
03/17/2009
Application #:
12030166
Filing Dt:
02/12/2008
Publication #:
Pub Dt:
06/26/2008
Title:
MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
32
Patent #:
Issue Dt:
09/08/2009
Application #:
12127640
Filing Dt:
05/27/2008
Publication #:
Pub Dt:
10/23/2008
Title:
OPTICAL METROLOGY OF SINGLE FEATURES
Assignor
1
Exec Dt:
03/19/2013
Assignee
1
3100 WEST WARREN AVE.
FREMONT, CALIFORNIA 94538
Correspondence name and address
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BOULEVARD
AUSTIN, TX 78741

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