Patent Assignment Details
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Reel/Frame: | 019534/0258 | |
| Pages: | 11 |
| | Recorded: | 07/10/2007 | | |
Attorney Dkt #: | 11460-129 CIP |
Conveyance: | NUNC PRO TUNC ASSIGNMENT (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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11150698
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Filing Dt:
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06/11/2005
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Publication #:
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Pub Dt:
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12/15/2005
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Title:
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FORMATION OF DOPED REGIONS AND/OR ULTRA-SHALLOW JUNCTIONS IN SEMICONDUCTOR MATERIALS BY GAS-CLUSTER ION IRRADIATION
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Assignee
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37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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DAVID W. GOMES
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BURNS & LEVINSON LLP
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125 SUMMER STREET, MA 02110
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