Patent Assignment Details
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| Reel/Frame: | 012110/0260 | |
| Pages: | 3 |
| | Recorded: | 08/27/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/07/1996
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Application #:
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08182159
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Filing Dt:
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02/02/1994
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Title:
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A FLUORINE-CONTAINING COMPOSITION FOR FORMING ANTI-REFLECTION FILM ON RESIST SURFACE AND PATTERN FORMATION METHOD
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Assignee
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| 455 FOREST ST. |
| MARLBOROUGH, MASSACHUSETTS 01752 |
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Correspondence name and address
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EDWARDS & ANGELL, LLP
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PETER F. CORLESS
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DIKE, BRONSTEIN, ROBERTS & CUSHMAN ET AL
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P.O. BOX 9169
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BOSTON, MA 02209
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05/27/2024 01:35 PM
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