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Total properties:
19
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Patent #:
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Issue Dt:
|
11/20/1990
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Application #:
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07494173
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Filing Dt:
|
03/14/1990
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Title:
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TEMPERATURE CONTROLLED CHUCK FOR ELEVATED TEMPERATURE ETCH PROCESSING
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Patent #:
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Issue Dt:
|
05/11/1993
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Application #:
|
07643197
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Filing Dt:
|
01/18/1991
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Title:
|
PARALLEL PLATE REACTOR AND METHOD OF USE
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Patent #:
|
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Issue Dt:
|
05/08/2001
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Application #:
|
09060095
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Filing Dt:
|
04/14/1998
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Title:
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SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
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Patent #:
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Issue Dt:
|
03/05/2002
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Application #:
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09257626
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Filing Dt:
|
02/25/1999
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Title:
|
METHOD FOR STRIPPING ION IMPLANTED PHOTORESIST LAYER
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Patent #:
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Issue Dt:
|
08/14/2001
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Application #:
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09314193
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Filing Dt:
|
05/19/1999
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Title:
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SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
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Patent #:
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Issue Dt:
|
12/23/2003
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Application #:
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09534657
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Filing Dt:
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03/24/2000
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Title:
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METHOD FOR ETCHING SIDEWALL POLYMER AND OTHER RESIDUES FROM THE SURFACE OF SEMICONDUCTOR DEVICES
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|
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Patent #:
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Issue Dt:
|
07/24/2001
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Application #:
|
09546750
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Filing Dt:
|
04/11/2000
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Title:
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MICROWAVE CHOKE FOR REMOTE PLASMA GENERATOR
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|
|
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Patent #:
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Issue Dt:
|
12/31/2002
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Application #:
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09565833
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Filing Dt:
|
05/05/2000
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Title:
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END-EFFECTOR WITH INTEGRATED COOLING MECHANISM
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Patent #:
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Issue Dt:
|
10/08/2002
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Application #:
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09579943
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Filing Dt:
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05/26/2000
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|
Title:
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RAPID HEATING AND COOLING OF WORKPIECE CHUCKS
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|
|
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Patent #:
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Issue Dt:
|
08/27/2002
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Application #:
|
09747452
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Filing Dt:
|
12/22/2000
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Publication #:
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Pub Dt:
|
08/22/2002
| | | | |
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Title:
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REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER
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|
|
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Patent #:
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Issue Dt:
|
03/05/2002
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Application #:
|
09747822
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Filing Dt:
|
12/22/2000
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Publication #:
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Pub Dt:
|
01/31/2002
| | | | |
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Title:
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Remote plasma mixer
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|
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Patent #:
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|
Issue Dt:
|
07/02/2002
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Application #:
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09748060
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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01/31/2002
| | | | |
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Title:
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DOWNSTREAM SAPPHIRE ELBOW JOINT FOR REMOTE PLASMA GENERATOR
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|
|
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Patent #:
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Issue Dt:
|
06/25/2002
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Application #:
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09749648
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
|
12/06/2001
| | | | |
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Title:
|
METHOD AND APPARATUS FOR INCREASED WORKPIECE THROUGHPUT
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|
|
|
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Patent #:
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|
Issue Dt:
|
05/18/2004
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Application #:
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10167937
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Filing Dt:
|
06/10/2002
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Publication #:
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Pub Dt:
|
10/24/2002
| | | | |
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Title:
|
APPARATUS FOR INCREASED WORKPIECE THROUGHPUT
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|
|
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Patent #:
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|
Issue Dt:
|
08/12/2003
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Application #:
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10170621
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Filing Dt:
|
06/10/2002
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|
Publication #:
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Pub Dt:
|
10/17/2002
| | | | |
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Title:
|
METHOD FOR INCREASED WORKPIECE THROUGHPUT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/09/2003
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Application #:
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10223226
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Filing Dt:
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08/16/2002
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Publication #:
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Pub Dt:
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12/26/2002
| | | | |
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Title:
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METHOD FOR PRODUCING FLAT WAFER CHUCKS
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|
|
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Patent #:
|
NONE
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Issue Dt:
|
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Application #:
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10624728
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Filing Dt:
|
07/21/2003
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Publication #:
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Pub Dt:
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05/13/2004
| | | | |
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Title:
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Dual chamber vacuum processing system
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10651433
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Filing Dt:
|
08/29/2003
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Publication #:
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Pub Dt:
|
08/05/2004
| | | | |
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Title:
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Gas tube end cap for a microwave plasma generator
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|
|
|
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Patent #:
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|
Issue Dt:
|
06/14/2005
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Application #:
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10660359
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Filing Dt:
|
09/10/2003
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|
Publication #:
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|
Pub Dt:
|
07/15/2004
| | | | |
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Title:
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METHOD OF HEATING A SUBSTRATE IN A VARIABLE TEMPERATURE PROCESS USING A FIXED TEMPERATURE CHUCK
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