Patent Assignment Details
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Reel/Frame: | 013671/0261 | |
| Pages: | 5 |
| | Recorded: | 01/10/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10226773
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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ATMOSPHERIC PRESSURE WAFER PROCESSING REACTOR HAVING AN INTERNAL PRESSURE CONTROL SYSTEM AND METHOD
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Assignee
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440 KINGS VILLAGE ROAD |
SCOTTS VALLEY, CALIFORNIA 95066 |
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Correspondence name and address
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MARIA S. SWIATEK
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DORSEY & WHITNEY LLP
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850 HANSEN WAY
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SUITE 200
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PALO ALTO, CA 94304-1017
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