Patent Assignment Details
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Reel/Frame: | 013771/0265 | |
| Pages: | 4 |
| | Recorded: | 06/30/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10254119
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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Use of ion beams for protecting substrates from particulate defect contamination in ultra-low-defect coating processes
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Assignee
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C/O INTEL CORPORATION |
SC1-2-B1, 3065 BOWERS AVE. |
SANTA CLARA, CALIFORNIA 95052-8119 |
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Correspondence name and address
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ALAN H. THOMPSON
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LAWRENCE LIVERMORE NAT. LAB.
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BOX 808, L-703
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LIVERMORE, CA 94551
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