Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 029733/0270 | |
| Pages: | 7 |
| | Recorded: | 02/01/2013 | | |
| Attorney Dkt #: | 15545-500005 |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 014885 FRAME 0260. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNEE NAME IS AXCELIS TECHNOLOGIES, INC. |
|
|
Total properties:
10
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09060095
|
Filing Dt:
|
04/14/1998
|
|
Title:
|
SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2001
|
Application #:
|
09314193
|
Filing Dt:
|
05/19/1999
|
|
Title:
|
SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/24/2001
|
Application #:
|
09546750
|
Filing Dt:
|
04/11/2000
|
|
Title:
|
MICROWAVE CHOKE FOR REMOTE PLASMA GENERATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2002
|
Application #:
|
09565833
|
Filing Dt:
|
05/05/2000
|
|
Title:
|
END-EFFECTOR WITH INTEGRATED COOLING MECHANISM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/08/2002
|
Application #:
|
09579943
|
Filing Dt:
|
05/26/2000
|
|
Title:
|
RAPID HEATING AND COOLING OF WORKPIECE CHUCKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2002
|
Application #:
|
09747452
|
Filing Dt:
|
12/22/2000
|
|
Publication #:
|
|
Pub Dt:
|
08/22/2002
| | | | |
|
Title:
|
REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/05/2002
|
Application #:
|
09747822
|
Filing Dt:
|
12/22/2000
|
|
Publication #:
|
|
Pub Dt:
|
01/31/2002
| | | | |
|
Title:
|
Remote plasma mixer
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2002
|
Application #:
|
09748060
|
Filing Dt:
|
12/22/2000
|
|
Publication #:
|
|
Pub Dt:
|
01/31/2002
| | | | |
|
Title:
|
DOWNSTREAM SAPPHIRE ELBOW JOINT FOR REMOTE PLASMA GENERATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/25/2002
|
Application #:
|
09749648
|
Filing Dt:
|
12/27/2000
|
|
Publication #:
|
|
Pub Dt:
|
12/06/2001
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR INCREASED WORKPIECE THROUGHPUT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2003
|
Application #:
|
10170621
|
Filing Dt:
|
06/10/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/17/2002
| | | | |
|
Title:
|
METHOD FOR INCREASED WORKPIECE THROUGHPUT
|
|
|
Assignee
|
|
|
|
|
| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
|
|
Correspondence name and address
|
| |
HARNESS, DICKEY & PIERCE, P.L.C.
|
| |
P.O. BOX 828
|
| |
BLOOMFIELD HILLS, MI 48303
|
Search Results as of:
06/16/2024 04:39 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
