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Reel/Frame:	027727/0275			Pages:	51
		Recorded:	02/16/2012
Conveyance:	NOTICE OF SECURITY INTEREST IN PATENTS

Total properties: 247
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Patent #:	6998166	Issue Dt:	02/14/2006	Application #:	10463730	Filing Dt:	06/17/2003
Publication #:	US20040258882	Pub Dt:	12/23/2004
Title:	POLISHING PAD WITH ORIENTED PORE STRUCTURE

Patent #:	7442645	Issue Dt:	10/28/2008	Application #:	10543848	Filing Dt:	07/29/2005
Publication #:	US20060196848	Pub Dt:	09/07/2006
Title:	METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC

Patent #:	7754098	Issue Dt:	07/13/2010	Application #:	10568727	Filing Dt:	02/17/2006
Publication #:	US20080057832	Pub Dt:	03/06/2008
Title:	CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME

Patent #:	7160807	Issue Dt:	01/09/2007	Application #:	10610407	Filing Dt:	06/30/2003
Publication #:	US20040266196	Pub Dt:	12/30/2004
Title:	CMP OF NOBLE METALS

Patent #:	7381648	Issue Dt:	06/03/2008	Application #:	10616335	Filing Dt:	07/09/2003
Publication #:	US20040009671	Pub Dt:	01/15/2004
Title:	CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES

Patent #:	7485241	Issue Dt:	02/03/2009	Application #:	10660379	Filing Dt:	09/11/2003
Publication #:	US20050056368	Pub Dt:	03/17/2005
Title:	CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME

Patent #:	7238618	Issue Dt:	07/03/2007	Application #:	10660687	Filing Dt:	09/11/2003
Publication #:	US20050072524	Pub Dt:	04/07/2005
Title:	SYSTEM FOR THE PREFERENTIAL REMOVAL OF SILICON OXIDE

Patent #:	7195539	Issue Dt:	03/27/2007	Application #:	10666797	Filing Dt:	09/19/2003
Publication #:	US20050060943	Pub Dt:	03/24/2005
Title:	POLISHING PAD WITH RECESSED WINDOW

Patent #:	6929983	Issue Dt:	08/16/2005	Application #:	10675417	Filing Dt:	09/30/2003
Publication #:	US20050067612	Pub Dt:	03/31/2005
Title:	METHOD OF FORMING A CURRENT CONTROLLING DEVICE

Patent #:	7317232	Issue Dt:	01/08/2008	Application #:	10689167	Filing Dt:	10/20/2003
Publication #:	US20050040484	Pub Dt:	02/24/2005
Title:	MEM SWITCHING DEVICE

Patent #:	6984588	Issue Dt:	01/10/2006	Application #:	10694408	Filing Dt:	10/27/2003
Publication #:	US20040089634	Pub Dt:	05/13/2004
Title:	COMPOSITIONS FOR OXIDE CMP

Patent #:	7264641	Issue Dt:	09/04/2007	Application #:	10705533	Filing Dt:	11/10/2003
Publication #:	US20050098540	Pub Dt:	05/12/2005
Title:	POLISHING PAD COMPRISING BIODEGRADABLE POLYMER

Patent #:	7288021	Issue Dt:	10/30/2007	Application #:	10753138	Filing Dt:	01/07/2004
Publication #:	US20050148290	Pub Dt:	07/07/2005
Title:	CHEMICAL-MECHANICAL POLISHING OF METALS IN AN OXIDIZED FORM

Patent #:	6984587	Issue Dt:	01/10/2006	Application #:	10753269	Filing Dt:	01/08/2004
Publication #:	US20050153554	Pub Dt:	07/14/2005
Title:	INTEGRATED POLISHING AND ELECTROLESS DEPOSITION

Patent #:	NONE	Issue Dt:		Application #:	10754390	Filing Dt:	01/09/2004
Publication #:	US20050153634	Pub Dt:	07/14/2005
Title:	Negative poisson's ratio material-containing CMP polishing pad

Patent #:	7255810	Issue Dt:	08/14/2007	Application #:	10755154	Filing Dt:	01/09/2004
Publication #:	US20050150598	Pub Dt:	07/14/2005
Title:	POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER

Patent #:	7317278	Issue Dt:	01/08/2008	Application #:	10763552	Filing Dt:	01/23/2004
Publication #:	US20040150322	Pub Dt:	08/05/2004
Title:	METHOD OF OPERATING AND PROCESS FOR FABRICATING AN ELECTRON SOURCE

Patent #:	6896593	Issue Dt:	05/24/2005	Application #:	10792183	Filing Dt:	03/03/2004
Publication #:	US20040171338	Pub Dt:	09/02/2004
Title:	MICROPOROUS POLISHING PADS

Patent #:	6899598	Issue Dt:	05/31/2005	Application #:	10792344	Filing Dt:	03/03/2004
Publication #:	US20040177563	Pub Dt:	09/16/2004
Title:	MICROPOROUS POLISHING PADS

Patent #:	6935931	Issue Dt:	08/30/2005	Application #:	10792348	Filing Dt:	03/03/2004
Publication #:	US20040171340	Pub Dt:	09/02/2004
Title:	MICROPOROUS POLISHING PADS

Patent #:	7001253	Issue Dt:	02/21/2006	Application #:	10801316	Filing Dt:	03/16/2004
Publication #:	US20040180612	Pub Dt:	09/16/2004
Title:	BORON-CONTAINING POLISHING SYSTEM AND METHOD

Patent #:	7195544	Issue Dt:	03/27/2007	Application #:	10807064	Filing Dt:	03/23/2004
Publication #:	US20050215177	Pub Dt:	09/29/2005
Title:	CMC POROUS PAD WITH COMPONENT-FILLED PORES

Patent #:	7059936	Issue Dt:	06/13/2006	Application #:	10807079	Filing Dt:	03/23/2004
Publication #:	US20050215179	Pub Dt:	09/29/2005
Title:	LOW SURFACE ENERGY CMP PAD

Patent #:	7204742	Issue Dt:	04/17/2007	Application #:	10808827	Filing Dt:	03/25/2004
Publication #:	US20050211376	Pub Dt:	09/29/2005
Title:	POLISHING PAD COMPRISING HYDROPHOBIC REGION AND ENDPOINT DETECTION PORT

Patent #:	7274772	Issue Dt:	09/25/2007	Application #:	10854944	Filing Dt:	05/27/2004
Publication #:	US20050276382	Pub Dt:	12/15/2005
Title:	X-RAY SOURCE WITH NONPARALLEL GEOMETRY

Patent #:	7306637	Issue Dt:	12/11/2007	Application #:	10855276	Filing Dt:	05/27/2004
Publication #:	US20040229552	Pub Dt:	11/18/2004
Title:	ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP

Patent #:	7277314	Issue Dt:	10/02/2007	Application #:	10855281	Filing Dt:	05/27/2004
Publication #:	US20050276143	Pub Dt:	12/15/2005
Title:	MOBILE ION MEMORY

Patent #:	7091604	Issue Dt:	08/15/2006	Application #:	10861007	Filing Dt:	06/04/2004
Publication #:	US20050269665	Pub Dt:	12/08/2005
Title:	THREE DIMENSIONAL INTEGRATED CIRCUITS

Patent #:	7438795	Issue Dt:	10/21/2008	Application #:	10865027	Filing Dt:	06/10/2004
Publication #:	US20050274627	Pub Dt:	12/15/2005
Title:	ELECTROCHEMICAL-MECHANICAL POLISHING SYSTEM

Patent #:	7247567	Issue Dt:	07/24/2007	Application #:	10869397	Filing Dt:	06/16/2004
Publication #:	US20050282391	Pub Dt:	12/22/2005
Title:	METHOD OF POLISHING A TUNGSTEN-CONTAINING SUBSTRATE

Patent #:	7198549	Issue Dt:	04/03/2007	Application #:	10869605	Filing Dt:	06/16/2004
Publication #:	US20050282470	Pub Dt:	12/22/2005
Title:	CONTINUOUS CONTOUR POLISHING OF A MULTI-MATERIAL SURFACE

Patent #:	7161247	Issue Dt:	01/09/2007	Application #:	10901420	Filing Dt:	07/28/2004
Publication #:	US20060024967	Pub Dt:	02/02/2006
Title:	POLISHING COMPOSITION FOR NOBLE METALS

Patent #:	8075372	Issue Dt:	12/13/2011	Application #:	10931908	Filing Dt:	09/01/2004
Publication #:	US20060046622	Pub Dt:	03/02/2006
Title:	POLISHING PAD WITH MICROPOROUS REGIONS

Patent #:	7563383	Issue Dt:	07/21/2009	Application #:	10963108	Filing Dt:	10/12/2004
Publication #:	US20060076317	Pub Dt:	04/13/2006
Title:	CMP COMPOSITION WITH A POLYMER ADDITIVE FOR POLISHING NOBLE METALS

Patent #:	7037175	Issue Dt:	05/02/2006	Application #:	10968571	Filing Dt:	10/19/2004
Publication #:	US20060084367	Pub Dt:	04/20/2006
Title:	METHOD OF SHARPENING CUTTING EDGES

Patent #:	8038752	Issue Dt:	10/18/2011	Application #:	10974460	Filing Dt:	10/27/2004
Publication #:	US20060086055	Pub Dt:	04/27/2006
Title:	METAL ION-CONTAINING CMP COMPOSITION AND METHOD FOR USING THE SAME

Patent #:	7524347	Issue Dt:	04/28/2009	Application #:	10975585	Filing Dt:	10/28/2004
Publication #:	US20060096496	Pub Dt:	05/11/2006
Title:	CMP COMPOSITION COMPRISING SURFACTANT

Patent #:	7504044	Issue Dt:	03/17/2009	Application #:	10982486	Filing Dt:	11/05/2004
Publication #:	US20060099814	Pub Dt:	05/11/2006
Title:	POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS

Patent #:	7354530	Issue Dt:	04/08/2008	Application #:	11033068	Filing Dt:	01/10/2005
Publication #:	US20050148187	Pub Dt:	07/07/2005
Title:	CHEMICAL MECHANICAL POLISHING SYSTEMS AND METHODS FOR THEIR USE

Patent #:	7686994	Issue Dt:	03/30/2010	Application #:	11070695	Filing Dt:	03/02/2005
Publication #:	US20060199002	Pub Dt:	09/07/2006
Title:	METHOD OF PREPARING A CONDUCTIVE FILM

Patent #:	7456482	Issue Dt:	11/25/2008	Application #:	11084287	Filing Dt:	03/18/2005
Publication #:	US20060273871	Pub Dt:	12/07/2006
Title:	CARBON NANOTUBE-BASED ELECTRONIC SWITCH

Patent #:	7497938	Issue Dt:	03/03/2009	Application #:	11088075	Filing Dt:	03/22/2005
Publication #:	US20060213781	Pub Dt:	09/28/2006
Title:	TRIBO-CHRONOAMPEROMETRY AS A TOOL FOR CMP APPLICATION

Patent #:	7311856	Issue Dt:	12/25/2007	Application #:	11093806	Filing Dt:	03/30/2005
Publication #:	US20060226126	Pub Dt:	10/12/2006
Title:	POLYMERIC INHIBITORS FOR ENHANCED PLANARIZATION

Patent #:	7435161	Issue Dt:	10/14/2008	Application #:	11113498	Filing Dt:	04/25/2005
Publication #:	US20050197050	Pub Dt:	09/08/2005
Title:	MULTI-LAYER POLISHING PAD MATERIAL FOR CMP

Patent #:	7427567	Issue Dt:	09/23/2008	Application #:	11145807	Filing Dt:	06/06/2005
Publication #:	US20060084272	Pub Dt:	04/20/2006
Title:	POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS

Patent #:	7998335	Issue Dt:	08/16/2011	Application #:	11150944	Filing Dt:	06/13/2005
Publication #:	US20060281196	Pub Dt:	12/14/2006
Title:	CONTROLLED ELECTROCHEMICAL POLISHING METHOD

Patent #:	7267607	Issue Dt:	09/11/2007	Application #:	11158694	Filing Dt:	06/22/2005
Publication #:	US20050277371	Pub Dt:	12/15/2005
Title:	TRANSPARENT MICROPOROUS MATERIALS FOR CMP

Patent #:	8062096	Issue Dt:	11/22/2011	Application #:	11173518	Filing Dt:	06/30/2005
Publication #:	US20070010098	Pub Dt:	01/11/2007
Title:	USE OF CMP FOR ALUMINUM MIRROR AND SOLAR CELL FABRICATION

Patent #:	NONE	Issue Dt:		Application #:	11205428	Filing Dt:	08/17/2005
Publication #:	US20070039926	Pub Dt:	02/22/2007
Title:	Abrasive-free polishing system

Patent #:	7316603	Issue Dt:	01/08/2008	Application #:	11235765	Filing Dt:	09/26/2005
Publication #:	US20060030158	Pub Dt:	02/09/2006
Title:	COMPOSITIONS AND METHODS FOR TANTALUM CMP

Patent #:	7955519	Issue Dt:	06/07/2011	Application #:	11241137	Filing Dt:	09/30/2005
Publication #:	US20070075040	Pub Dt:	04/05/2007
Title:	COMPOSITION AND METHOD FOR PLANARIZING SURFACES

Patent #:	7447298	Issue Dt:	11/04/2008	Application #:	11241214	Filing Dt:	09/30/2005
Publication #:	US20060049359	Pub Dt:	03/09/2006
Title:	DECONTAMINATION AND STERILIZATION SYSTEM USING LARGE AREA X-RAY SOURCE

Patent #:	7265055	Issue Dt:	09/04/2007	Application #:	11259645	Filing Dt:	10/26/2005
Publication #:	US20070090094	Pub Dt:	04/26/2007
Title:	CMP OF COPPER/RUTHENIUM SUBSTRATES

Patent #:	7311862	Issue Dt:	12/25/2007	Application #:	11265607	Filing Dt:	11/02/2005
Publication #:	US20060052040	Pub Dt:	03/09/2006
Title:	METHOD FOR MANUFACTURING MICROPOROUS CMP MATERIALS HAVING CONTROLLED PORE SIZE

Patent #:	7531105	Issue Dt:	05/12/2009	Application #:	11294853	Filing Dt:	12/06/2005
Publication #:	US20060108326	Pub Dt:	05/25/2006
Title:	POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS

Patent #:	NONE	Issue Dt:		Application #:	11374238	Filing Dt:	03/13/2006
Publication #:	US20070209287	Pub Dt:	09/13/2007
Title:	Composition and method to polish silicon nitride

Patent #:	7732393	Issue Dt:	06/08/2010	Application #:	11384538	Filing Dt:	03/20/2006
Publication #:	US20070219104	Pub Dt:	09/20/2007
Title:	OXIDATION-STABILIZED CMP COMPOSITIONS AND METHODS

Patent #:	8551202	Issue Dt:	10/08/2013	Application #:	11387558	Filing Dt:	03/23/2006
Publication #:	US20070224919	Pub Dt:	09/27/2007
Title:	IODATE-CONTAINING CHEMICAL-MECHANICAL POLISHING COMPOSITIONS AND METHODS

Patent #:	7820067	Issue Dt:	10/26/2010	Application #:	11388085	Filing Dt:	03/23/2006
Publication #:	US20070224822	Pub Dt:	09/27/2007
Title:	HALIDE ANIONS FOR METAL REMOVAL RATE CONTROL

Patent #:	7585340	Issue Dt:	09/08/2009	Application #:	11412369	Filing Dt:	04/27/2006
Publication #:	US20070251155	Pub Dt:	11/01/2007
Title:	POLISHING COMPOSITION CONTAINING POLYETHER AMINE

Patent #:	7368066	Issue Dt:	05/06/2008	Application #:	11444866	Filing Dt:	05/31/2006
Publication #:	US20070278184	Pub Dt:	12/06/2007
Title:	GOLD CMP COMPOSITION AND METHOD

Patent #:	8759216	Issue Dt:	06/24/2014	Application #:	11448205	Filing Dt:	06/07/2006
Publication #:	US20070298612	Pub Dt:	12/27/2007
Title:	Compositions and methods for polishing silicon nitride materials

Patent #:	NONE	Issue Dt:		Application #:	11478004	Filing Dt:	06/29/2006
Publication #:	US20080220610	Pub Dt:	09/11/2008
Title:	Silicon oxide polishing method utilizing colloidal silica

Patent #:	7294576	Issue Dt:	11/13/2007	Application #:	11478023	Filing Dt:	06/29/2006
Title:	TUNABLE SELECTIVITY SLURRIES IN CMP APPLICATIONS

Patent #:	7998228	Issue Dt:	08/16/2011	Application #:	11489054	Filing Dt:	07/19/2006
Publication #:	US20080016784	Pub Dt:	01/24/2008
Title:	TANTALUM CMP COMPOSITIONS AND METHODS

Patent #:	7501346	Issue Dt:	03/10/2009	Application #:	11491055	Filing Dt:	07/21/2006
Publication #:	US20080020577	Pub Dt:	01/24/2008
Title:	GALLIUM AND CHROMIUM IONS FOR OXIDE RATE ENHANCEMENT

Patent #:	NONE	Issue Dt:		Application #:	11491612	Filing Dt:	07/24/2006
Publication #:	US20080020680	Pub Dt:	01/24/2008
Title:	Rate-enhanced CMP compositions for dielectric films

Patent #:	7678700	Issue Dt:	03/16/2010	Application #:	11515546	Filing Dt:	09/05/2006
Publication #:	US20080057713	Pub Dt:	03/06/2008
Title:	SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS

Patent #:	9129907	Issue Dt:	09/08/2015	Application #:	11517909	Filing Dt:	09/08/2006
Publication #:	US20080060278	Pub Dt:	03/13/2008
Title:	Onium-containing CMP compositions and methods of use thereof

Patent #:	8057561	Issue Dt:	11/15/2011	Application #:	11518674	Filing Dt:	09/11/2006
Publication #:	US20080060277	Pub Dt:	03/13/2008
Title:	POLYOXOMETALATE COMPOSITIONS AND METHODS

Patent #:	NONE	Issue Dt:		Application #:	11591730	Filing Dt:	11/02/2006
Publication #:	US20080105652	Pub Dt:	05/08/2008
Title:	CMP of copper/ruthenium/tantalum substrates

Patent #:	7456107	Issue Dt:	11/25/2008	Application #:	11595536	Filing Dt:	11/09/2006
Publication #:	US20080111101	Pub Dt:	05/15/2008
Title:	COMPOSITIONS AND METHODS FOR CMP OF LOW-K-DIELECTRIC MATERIALS

Patent #:	7837888	Issue Dt:	11/23/2010	Application #:	11599199	Filing Dt:	11/13/2006
Publication #:	US20080113589	Pub Dt:	05/15/2008
Title:	COMPOSITION AND METHOD FOR DAMASCENE CMP

Patent #:	7365013	Issue Dt:	04/29/2008	Application #:	11620517	Filing Dt:	01/05/2007
Publication #:	US20070120090	Pub Dt:	05/31/2007
Title:	SYSTEM FOR THE PREFERENTIAL REMOVAL OF SILICON OXIDE

Patent #:	9343330	Issue Dt:	05/17/2016	Application #:	11634576	Filing Dt:	12/06/2006
Publication #:	US20080134585	Pub Dt:	06/12/2008
Title:	COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES

Patent #:	7582127	Issue Dt:	09/01/2009	Application #:	11670137	Filing Dt:	02/01/2007
Publication #:	US20070214728	Pub Dt:	09/20/2007
Title:	POLISHING COMPOSITION FOR A TUNGSTEN-CONTAINING SUBSTRATE

Patent #:	7803203	Issue Dt:	09/28/2010	Application #:	11673399	Filing Dt:	02/09/2007
Publication #:	US20070181535	Pub Dt:	08/09/2007
Title:	COMPOSITIONS AND METHODS FOR CMP OF SEMICONDUCTOR MATERIALS

Patent #:	7776230	Issue Dt:	08/17/2010	Application #:	11673518	Filing Dt:	02/09/2007
Publication #:	US20080057715	Pub Dt:	03/06/2008
Title:	CMP SYSTEM UTILIZING HALOGEN ADDUCT

Patent #:	7557566	Issue Dt:	07/07/2009	Application #:	11681258	Filing Dt:	03/02/2007
Publication #:	US20080214092	Pub Dt:	09/04/2008
Title:	METHOD AND APPARATUS FOR MEASUREMENT OF MAGNETIC PERMEABILITY OF A MATERIAL

Patent #:	7699684	Issue Dt:	04/20/2010	Application #:	11690944	Filing Dt:	03/26/2007
Publication #:	US20070180778	Pub Dt:	08/09/2007
Title:	CMP POROUS PAD WITH COMPONENT-FILLED PORES

Patent #:	7897061	Issue Dt:	03/01/2011	Application #:	11699129	Filing Dt:	01/29/2007
Publication #:	US20070178700	Pub Dt:	08/02/2007
Title:	COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

Patent #:	NONE	Issue Dt:		Application #:	11706929	Filing Dt:	02/14/2007
Publication #:	US20070190789	Pub Dt:	08/16/2007
Title:	Compositions and methods for CMP of indium tin oxide surfaces

Patent #:	7542549	Issue Dt:	06/02/2009	Application #:	11779752	Filing Dt:	07/18/2007
Publication #:	US20080008294	Pub Dt:	01/10/2008
Title:	X-RAY SOURCE WITH NONPARALLEL GEOMETRY

Patent #:	8541310	Issue Dt:	09/24/2013	Application #:	11800188	Filing Dt:	05/04/2007
Publication #:	US20080274619	Pub Dt:	11/06/2008
Title:	CMP compositions containing a soluble peroxometalate complex and methods of use thereof

Patent #:	7803711	Issue Dt:	09/28/2010	Application #:	11856790	Filing Dt:	09/18/2007
Publication #:	US20090075566	Pub Dt:	03/19/2009
Title:	LOW PH BARRIER SLURRY BASED ON TITANIUM DIOXIDE

Patent #:	8008202	Issue Dt:	08/30/2011	Application #:	11888406	Filing Dt:	08/01/2007
Publication #:	US20090035942	Pub Dt:	02/05/2009
Title:	RUTHENIUM CMP COMPOSITIONS AND METHODS

Patent #:	8167684	Issue Dt:	05/01/2012	Application #:	11892720	Filing Dt:	08/27/2007
Publication #:	US20080096470	Pub Dt:	04/24/2008
Title:	CHEMICAL MECHANICAL POLISHING SLURRY, ITS PREPARATION METHOD, AND USE FOR THE SAME

Patent #:	NONE	Issue Dt:		Application #:	11895896	Filing Dt:	08/28/2007
Publication #:	US20090056231	Pub Dt:	03/05/2009
Title:	Copper CMP composition containing ionic polyelectrolyte and method

Patent #:	NONE	Issue Dt:		Application #:	11937804	Filing Dt:	11/09/2007
Publication #:	US20090124173	Pub Dt:	05/14/2009
Title:	COMPOSITIONS AND METHODS FOR RUTHENIUM AND TANTALUM BARRIER CMP

Patent #:	8591763	Issue Dt:	11/26/2013	Application #:	11960135	Filing Dt:	12/19/2007
Publication #:	US20080096390	Pub Dt:	04/24/2008
Title:	HALIDE ANIONS FOR METAL REMOVAL RATE CONTROL

Patent #:	7922926	Issue Dt:	04/12/2011	Application #:	11970978	Filing Dt:	01/08/2008
Publication #:	US20090173717	Pub Dt:	07/09/2009
Title:	COMPOSITION AND METHOD FOR POLISHING NICKEL-PHOSPHOROUS-COATED ALUMINUM HARD DISKS

Patent #:	7955520	Issue Dt:	06/07/2011	Application #:	11986921	Filing Dt:	11/27/2007
Publication #:	US20090134122	Pub Dt:	05/28/2009
Title:	COPPER-PASSIVATING CMP COMPOSITIONS AND METHODS

Patent #:	7875469	Issue Dt:	01/25/2011	Application #:	12001631	Filing Dt:	12/12/2007
Publication #:	US20080095315	Pub Dt:	04/24/2008
Title:	METHOD OF OPERATING AND PROCESS FOR FABRICATING AN ELECTRON SOURCE

Patent #:	NONE	Issue Dt:		Application #:	12011435	Filing Dt:	01/25/2008
Publication #:	US20080132071	Pub Dt:	06/05/2008
Title:	Composition and method for enhancing pot life of hydrogen peroxide-containing CMP slurries

Patent #:	7998866	Issue Dt:	08/16/2011	Application #:	12043010	Filing Dt:	03/05/2008
Publication #:	US20080153292	Pub Dt:	06/26/2008
Title:	SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS

Patent #:	8425797	Issue Dt:	04/23/2013	Application #:	12052970	Filing Dt:	03/21/2008
Publication #:	US20090236559	Pub Dt:	09/24/2009
Title:	COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES

Patent #:	8251777	Issue Dt:	08/28/2012	Application #:	12069495	Filing Dt:	02/11/2008
Publication #:	US20080200098	Pub Dt:	08/21/2008
Title:	POLISHING SLURRY FOR ALUMINUM AND ALUMINUM ALLOYS

Patent #:	8017524	Issue Dt:	09/13/2011	Application #:	12126739	Filing Dt:	05/23/2008
Publication #:	US20090291559	Pub Dt:	11/26/2009
Title:	STABLE, HIGH RATE SILICON SLURRY

Patent #:	8247326	Issue Dt:	08/21/2012	Application #:	12170954	Filing Dt:	07/10/2008
Publication #:	US20100009537	Pub Dt:	01/14/2010
Title:	METHOD OF POLISHING NICKEL-PHOSPHOROUS

100

Patent #:	8247327	Issue Dt:	08/21/2012	Application #:	12221023	Filing Dt:	07/30/2008
Publication #:	US20100029181	Pub Dt:	02/04/2010
Title:	METHODS AND COMPOSITIONS FOR POLISHING SILICON-CONTAINING SUBSTRATES

Assignor

CABOT MICROELECTRONICS CORPORATION

Exec Dt:

02/13/2012

Assignee

BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT

135 S. LASALLE STREET

IL4-135-05-41

CHICAGO, ILLINOIS 60603

Correspondence name and address
	TERRY L. WITCHER, PARALEGAL
	201 N. TRYON STREET, SUITE 3000
	MCGUIREWOODS LLP
	CHARLOTTE, NC 28202

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