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Total properties:
11
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10397085
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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CLUSTERING FOR DATA COMPRESSION
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10430954
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Filing Dt:
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05/05/2003
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Publication #:
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Pub Dt:
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10/30/2003
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Title:
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OPTICAL PROFILOMETRY OF ADDITIONAL-MATERIAL DEVIATIONS IN A PERIODIC GRATING
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10739660
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Filing Dt:
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12/17/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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GRATING TEST PATTERNS AND METHODS FOR OVERLAY METROLOGY
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10757689
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Filing Dt:
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01/13/2004
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Publication #:
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Pub Dt:
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07/29/2004
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Title:
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BALANCING PLANARIZATION OF LAYERS AND THE EFFECT OF UNDERLYING STRUCTURE ON THE METROLOGY SIGNAL
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10853060
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Filing Dt:
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05/24/2004
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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OPTICAL METROLOGY OF SINGLE FEATURES
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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10856183
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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11/11/2004
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Title:
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METHOD AND SYSTEM OF DYNAMIC LEARNING THROUGH A REGRESSION-BASED LIBRARY GENERATION PROCESS
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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10857002
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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11/04/2004
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Title:
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METHOD AND SYSTEM OF DYNAMIC LEARNING THROUGH A REGRESSION-BASED LIBRARY GENERATION PROCESS
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10936983
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Filing Dt:
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09/08/2004
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Publication #:
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Pub Dt:
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02/10/2005
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Title:
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OVERLAY MEASUREMENTS USING ZERO-ORDER CROSS POLARIZATION MEASUREMENTS
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10964353
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Filing Dt:
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10/12/2004
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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CACHING OF INTRA-LAYER CALCULATIONS FOR RAPID RIGOROUS COUPLED-WAVE ANALYSES
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Patent #:
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Issue Dt:
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10/02/2007
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Application #:
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11189161
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Filing Dt:
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07/25/2005
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Publication #:
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Pub Dt:
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11/17/2005
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Title:
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GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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11404645
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Filing Dt:
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04/14/2006
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Publication #:
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Pub Dt:
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08/24/2006
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Title:
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OPTICAL METROLOGY OF SINGLE FEATURES
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