Patent Assignment Details
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| Reel/Frame: | 013864/0276 | |
| Pages: | 3 |
| | Recorded: | 03/07/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10384089
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Filing Dt:
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03/07/2003
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Publication #:
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Pub Dt:
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09/11/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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Correspondence name and address
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MORRISON & FOERSTER LLP
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DAVID L. FEHRMAN
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555 WEST FIFTH STREET
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SUITE 3500
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LOS ANGELES, CA 90013-1024
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