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Patent Assignment Details
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Reel/Frame:008947/0277   Pages: 2
Recorded: 01/30/1998
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/21/1998
Application #:
08626863
Filing Dt:
04/03/1996
Title:
POSITION RESOLUTION OF AN INTERFEROMETRIALLY CONTROLLED MOVING STAGE BY REGRESSION ANALYSIS
Assignor
1
Exec Dt:
01/22/1998
Assignee
1
2-3 MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO, JAPAN
Correspondence name and address
SKJERVEN, MORRILL, MACPHERSON, ET AL
NORMAN R. KLIVANS
25 METRO DRIVE
SUITE 700
SAN JOSE, CA 95110

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