Patent Assignment Details
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Reel/Frame: | 008947/0277 | |
| Pages: | 2 |
| | Recorded: | 01/30/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/21/1998
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Application #:
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08626863
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Filing Dt:
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04/03/1996
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Title:
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POSITION RESOLUTION OF AN INTERFEROMETRIALLY CONTROLLED MOVING STAGE BY REGRESSION ANALYSIS
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Assignee
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2-3 MARUNOUCHI 3-CHOME |
CHIYODA-KU, TOKYO, JAPAN |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON, ET AL
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NORMAN R. KLIVANS
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25 METRO DRIVE
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SUITE 700
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SAN JOSE, CA 95110
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