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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09583157
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Filing Dt:
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05/30/2000
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Title:
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INTEGRATED RESONATOR AND AMPLIFIER SYSTEM
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09625718
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Filing Dt:
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07/25/2000
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Title:
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WAVEGUIDE FOR MICROWAVE EXCITATION OF PLASMA IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09633322
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Filing Dt:
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08/07/2000
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Title:
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ION SOURCE HAVING REPLACEABLE AND SPUTTERABLE SOLID SOURCE MATERIAL
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09637096
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Filing Dt:
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08/10/2000
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Title:
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COMPACT LOAD LOCK SYSTEM FOR ION BEAM PROCESSING OF FOUPS
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09654379
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Filing Dt:
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09/01/2000
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Title:
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SYSTEM AND METHOD FOR REMOVING CONTAMINANT PARTICLES RELATIVE TO AN ION BEAM
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Patent #:
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Issue Dt:
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08/19/2003
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Application #:
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09703769
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Filing Dt:
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11/01/2000
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Title:
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MECHANISM FOR PREVENTION OF NEUTRON RADIATION IN ION IMPLANTER BEAMLINE
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09742910
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Filing Dt:
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12/20/2000
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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CONTAMINANT COLLECTOR TRAP FOR ION IMPLANTER
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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09748735
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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IN-PROCESS WAFER CHARGE MONITOR AND CONTROL SYSTEM FOR ION IMPLANTER
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09772146
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Filing Dt:
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01/29/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND SYSTEM FOR DETERMINING PRESSURE COMPENSATION FACTORS IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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09865155
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Filing Dt:
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05/24/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09887808
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Filing Dt:
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06/22/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Title:
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ION IMPLANTATION UNIFORMITY CORRECTION USING BEAM CURRENT CONTROL
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09905031
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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WAFER TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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09906276
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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PLASMA CURING OF MSQ-BASED POROUS LOW-K FILM MATERIALS
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Patent #:
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Issue Dt:
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10/25/2005
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Application #:
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09934785
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Filing Dt:
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08/22/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Title:
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DECABORANE ION SOURCE
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09975685
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Filing Dt:
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10/11/2001
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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CHARGE MEASURING DEVICE WITH WIDE DYNAMIC RANGE
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10032664
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Filing Dt:
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10/19/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Title:
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SYSTEM AND METHOD FOR RAPIDLY CONTROLLING THE OUTPUT OF AN ION SOURCE FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10036144
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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METHOD AND APPARATUS FOR IMPROVED ION ACCELERATION IN AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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10054325
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Filing Dt:
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10/25/2001
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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WAFER PEDESTAL TILT MECHANISM AND COOLING SYSTEM
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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10192344
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Filing Dt:
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07/10/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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10224778
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Filing Dt:
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08/21/2002
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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METHOD AND APPARATUS FOR IMPROVED ION BUNCHING IN AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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10224779
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Filing Dt:
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08/21/2002
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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SLIT DOUBLE GAP BUNCHER AND METHOD FOR IMPROVED ION BUNCHING IN AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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10248074
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Filing Dt:
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12/16/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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APPARATUS AND PROCESS FOR MEASURING LIGHT INTENSITIES
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10361658
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/12/2004
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Title:
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RADIANT HEATING SOURCE WITH REFLECTIVE CAVITY SPANNING AT LEAST TWO HEATING ELEMENTS
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10370952
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Filing Dt:
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02/21/2003
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Title:
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DEFLECTING ACCELERATION /DECELERATION GAP
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10371606
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Filing Dt:
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02/21/2003
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Title:
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ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER UTILIZING A LINEAR SCAN MOTOR
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10386262
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Filing Dt:
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03/11/2003
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Publication #:
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Pub Dt:
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01/01/2004
| | | | |
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Title:
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ION SOURCE HAVING REPLACEABLE AND SPUTTERABLE SOLID SOURCE MATERIAL
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10404493
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Filing Dt:
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04/01/2003
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Publication #:
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Pub Dt:
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10/07/2004
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Title:
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ION BEAM INCIDENT ANGLE DETECTOR FOR ION IMPLANT SYSTEMS
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10420329
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Filing Dt:
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04/22/2003
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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HIGH-PERFORMANCE ELECTROSTATIC CLAMP COMPRISING A RESISTIVE LAYER, MICRO-GROOVES, AND DIELECTRIC LAYER
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10425924
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Filing Dt:
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04/29/2003
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Title:
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BEAM UNIFORMITY AND ANGULAR DISTRIBUTION MEASUREMENT SYSTEM
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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10444019
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Filing Dt:
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05/22/2003
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Publication #:
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Pub Dt:
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11/25/2004
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Title:
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WORK-PIECE TREATMENT SYSTEM HAVING LOAD LOCK AND BUFFER
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10444413
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Filing Dt:
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05/23/2003
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
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Title:
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METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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10448156
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Filing Dt:
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05/29/2003
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Title:
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PRESSURE CONTROLLED HEAT SOURCE AND METHOD FOR USING SUCH FOR RTP
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10461702
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Filing Dt:
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06/13/2003
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Publication #:
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Pub Dt:
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11/18/2004
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Title:
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HYBRID MAGNETIC/ELECTROSTATIC DEFLECTOR FOR ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10606087
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Filing Dt:
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06/25/2003
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Title:
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HIGH MASS RESOLUTION MAGNET FOR RIBBON BEAM ION IMPLANTERS
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10607239
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Filing Dt:
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06/26/2003
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Title:
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ELECTROSTATIC PARALLELIZING LENS FOR ION BEAMS
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Patent #:
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Issue Dt:
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03/14/2006
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Application #:
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10627894
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Filing Dt:
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07/24/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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FLUORINE-FREE PLASMA CURING PROCESS FOR POROUS LOW-K MATERIALS
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10642939
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Filing Dt:
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08/18/2003
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Publication #:
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Pub Dt:
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02/24/2005
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Title:
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MEMS BASED MULTI-POLAR ELECTROSTATIC CHUCK
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10654168
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Filing Dt:
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09/03/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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UNIPOLAR ELECTROSTATIC QUADRUPOLE LENS AND SWITCHING METHODS FOR CHARGED BEAM TRANSPORT
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10657449
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Filing Dt:
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09/08/2003
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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CLAMPING AND DE-CLAMPING SEMICONDUCTOR WAFERS ON AN ELECTROSTATIC CHUCK USING WAFER INERTIAL CONFINEMENT BY APPLYING A SINGLE-PHASE SQUARE WAVE AC CLAMPING VOLTAGE
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10661180
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Filing Dt:
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09/12/2003
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Publication #:
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Pub Dt:
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03/17/2005
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Title:
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CLAMPING AND DE-CLAMPING SEMICONDUCTOR WAFERS ON A J-R ELECTROSTATIC CHUCK HAVING A MICROMACHINED SURFACE BY USING FORCE DELAY IN APPLYING A SINGLE-PHASE SQUARE WAVE AC CLAMPING VOLTAGE
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10681511
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Filing Dt:
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10/08/2003
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Title:
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METHOD OF TUNING ELECTROSTATIC QUADRUPOLE ELECTRODES OF AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10695153
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Filing Dt:
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10/28/2003
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Publication #:
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Pub Dt:
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05/12/2005
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Title:
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METHOD OF MAKING A MEMS ELECTROSTATIC CHUCK
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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10702368
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Filing Dt:
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11/06/2003
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Publication #:
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Pub Dt:
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05/12/2005
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Title:
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SEGMENTED RESONANT ANTENNA FOR RADIO FREQUENCY INDUCTIVELY COUPLED PLASMAS
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10753731
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Filing Dt:
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01/08/2004
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Publication #:
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Pub Dt:
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11/18/2004
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Title:
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HIGH MASS RESOLUTION MAGNET FOR RIBBON BEAM ION IMPLANTERS
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10788861
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Filing Dt:
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02/27/2004
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Publication #:
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Pub Dt:
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09/01/2005
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Title:
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MODULATING ION BEAM CURRENT
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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10794009
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Filing Dt:
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03/05/2004
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Publication #:
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Pub Dt:
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09/08/2005
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Title:
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WORK PIECE TRANSFER SYSTEM FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10803439
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Filing Dt:
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03/18/2004
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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IN-SITU MONITORING ON AN ION IMPLANTER
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Patent #:
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Issue Dt:
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10/18/2005
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Application #:
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10815586
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Filing Dt:
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04/01/2004
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Publication #:
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Pub Dt:
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10/06/2005
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Title:
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METHOD AND APPARATUS FOR SELECTIVE PRE-DISPERSION OF EXTRACTED ION BEAMS IN ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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01/10/2006
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Application #:
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10825527
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Filing Dt:
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04/15/2004
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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BEAM ANGLE CONTROL IN A BATCH ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10826419
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Filing Dt:
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04/16/2004
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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WORK-PIECE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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10830734
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Filing Dt:
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04/23/2004
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Publication #:
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Pub Dt:
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11/10/2005
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Title:
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SIMPLIFIED WAFER ALIGNMENT
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10850298
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Filing Dt:
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05/20/2004
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Title:
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TWO DIMENSIONAL STATIONARY BEAM PROFILE AND ANGULAR MAPPING
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10860451
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Filing Dt:
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06/03/2004
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Publication #:
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Pub Dt:
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12/08/2005
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Title:
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DOSE CUP LOCATED NEAR BEND IN FINAL ENERGY FILTER OF SERIAL IMPLANTER FOR CLOSED LOOP DOSE CONTROL
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10865061
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Filing Dt:
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06/10/2004
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Title:
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ION BEAM SCANNING SYSTEMS AND METHODS FOR IMPROVED ION IMPLANTATION UNIFORMITY
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Patent #:
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Issue Dt:
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01/24/2006
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Application #:
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10886308
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Filing Dt:
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07/07/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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DEVICE AND METHOD FOR MEASUREMENT OF BEAM ANGLE AND DIVERGENCE
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Patent #:
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Issue Dt:
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07/26/2005
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Application #:
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10889193
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Filing Dt:
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07/12/2004
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Publication #:
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Pub Dt:
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12/09/2004
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Title:
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SUBSTRATE POSITIONING SYSTEM
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10894209
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Filing Dt:
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07/19/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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ELECTROSTATIC LENS FOR ION BEAMS
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10913836
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Filing Dt:
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08/06/2004
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Publication #:
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Pub Dt:
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02/09/2006
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Title:
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WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER FEATURING SPHERICAL SLIDING SEAL VACUUM FEEDTHROUGH
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10917597
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Filing Dt:
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08/13/2004
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND UNIFORMITY CONTROL
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10917997
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Filing Dt:
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08/13/2004
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO A WORKPIECE
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Patent #:
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Issue Dt:
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07/19/2011
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Application #:
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10940263
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Filing Dt:
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09/14/2004
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Publication #:
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Pub Dt:
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03/16/2006
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Title:
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CONTROLLED DOSE ION IMPLANTATION
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10944989
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Filing Dt:
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09/20/2004
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Title:
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ION BEAM UTILIZATION DURING SCANNED ION IMPLANTATION
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10967855
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Filing Dt:
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10/18/2004
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Title:
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SYSTEMS AND METHODS FOR ION BEAM FOCUSING
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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10987276
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Filing Dt:
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11/12/2004
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Publication #:
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Pub Dt:
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05/18/2006
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Title:
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ULTRAVIOLET ASSISTED PORE SEALING OF POROUS LOW K DIELECTRIC FILMS
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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11006840
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Filing Dt:
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12/08/2004
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Publication #:
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Pub Dt:
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07/28/2005
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Title:
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METHOD OF CORRECTION FOR WAFER CRYSTAL CUT ERROR IN SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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11012585
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Filing Dt:
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12/15/2004
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Publication #:
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Pub Dt:
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06/15/2006
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Title:
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METHOD AND APPARATUS FOR ION BEAM PROFILING
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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11029052
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Filing Dt:
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01/04/2005
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Publication #:
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Pub Dt:
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07/06/2006
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Title:
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ION BEAM SCANNING CONTROL METHODS AND SYSTEMS FOR ION IMPLANTATION UNIFORMITY
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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11037491
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Filing Dt:
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01/18/2005
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Title:
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IN-SITU CLEANING OF BEAM DEFINING APERTURES IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/03/2007
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Application #:
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11043758
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Filing Dt:
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01/26/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Title:
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PARTS AUTHENTICATION EMPLOYING RADIO FREQUENCY IDENTIFICATION
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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11047238
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Filing Dt:
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01/31/2005
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Title:
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BIASED ELECTROSTATIC DEFLECTOR
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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11049913
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Filing Dt:
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02/03/2005
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Publication #:
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Pub Dt:
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08/03/2006
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Title:
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ION SOURCE FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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10/06/2009
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Application #:
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11074434
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Filing Dt:
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03/08/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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MULTICHANNEL ION GUN
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11098878
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Filing Dt:
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04/05/2005
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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RECIPROCATING DRIVE FOR SCANNING A WORKPIECE
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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11098942
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Filing Dt:
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04/05/2005
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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RECIPROCATING DRIVE FOR SCANNING A WORKPIECE THROUGH AN ION BEAM
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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11099062
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Filing Dt:
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04/05/2005
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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METHOD FOR RECIPROCATING A WORKPIECE THROUGH AN ION BEAM
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11146742
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Filing Dt:
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06/07/2005
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Publication #:
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Pub Dt:
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02/02/2006
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Title:
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ULTRAVIOLET ASSISTED POROGEN REMOVAL AND/OR CURING PROCESSES FOR FORMING POROUS LOW K DIELECTRICS
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Patent #:
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Issue Dt:
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01/22/2008
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Application #:
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11147973
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Filing Dt:
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06/08/2005
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Publication #:
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Pub Dt:
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01/11/2007
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Title:
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WORKPIECE HANDLING ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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11155525
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Filing Dt:
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06/17/2005
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Publication #:
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Pub Dt:
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06/29/2006
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Title:
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APPARATUS AND PROCESS FOR TREATING DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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11219281
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Filing Dt:
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09/02/2005
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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WORKPIECE TRANSFER DEVICE
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11235754
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Filing Dt:
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09/27/2005
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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ION BEAM PROFILER
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Patent #:
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Issue Dt:
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04/15/2008
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Application #:
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11272529
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Filing Dt:
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11/10/2005
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Publication #:
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Pub Dt:
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05/10/2007
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Title:
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ION IMPLANTER WITH CONTAMINANT COLLECTING SURFACE
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Patent #:
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Issue Dt:
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03/31/2009
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Application #:
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11273039
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Filing Dt:
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11/14/2005
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Publication #:
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Pub Dt:
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04/05/2007
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Title:
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SYSTEMS AND METHODS THAT MITIGATE CONTAMINATION AND MODIFY SURFACE CHARACTERISTICS DURING ION IMPLANTATION PROCESSES THROUGH THE INTRODUCTION OF GASES
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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11288908
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Filing Dt:
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11/29/2005
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Publication #:
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Pub Dt:
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05/31/2007
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Title:
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ION IMPLANTATION BEAM ANGLE CALIBRATION
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11290344
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Filing Dt:
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11/30/2005
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Publication #:
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Pub Dt:
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05/31/2007
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Title:
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MEANS TO ESTABLISH ORIENTATION OF ION BEAM TO WAFER AND CORRECT ANGLE ERRORS
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11290346
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Filing Dt:
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11/30/2005
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Publication #:
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Pub Dt:
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05/31/2007
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Title:
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BEAM CURRENT STABILIZATION UTILIZING GAS FEED CONTROL LOOP
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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11294975
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Filing Dt:
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12/06/2005
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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ION IMPLANTER WITH IONIZATION CHAMBER ELECTRODE DESIGN
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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11299593
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Filing Dt:
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12/12/2005
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Publication #:
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Pub Dt:
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06/28/2007
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Title:
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ION BEAM ANGLE MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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01/13/2009
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Application #:
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11313319
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Filing Dt:
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12/21/2005
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Publication #:
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Pub Dt:
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06/21/2007
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Title:
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ION BEAM ANGLE MEASUREMENT SYSTEMS AND METHODS EMPLOYING VARIED ANGLE SLOT ARRAYS FOR ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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07/22/2008
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Application #:
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11334265
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Filing Dt:
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01/18/2006
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Publication #:
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Pub Dt:
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07/19/2007
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Title:
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APPLICATION OF DIGITAL FREQUENCY AND PHASE SYNTHESIS FOR CONTROL OF ELECTRODE VOLTAGE PHASE IN A HIGH-ENERGY ION IMPLANTATION MACHINE, AND A MEANS FOR ACCURATE CALIBRATION OF ELECTRODE VOLTAGE PHASE
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Patent #:
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Issue Dt:
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09/09/2008
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Application #:
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11374945
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Filing Dt:
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03/14/2006
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Publication #:
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Pub Dt:
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03/13/2008
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Title:
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ION BEAM MONITORING IN AN ION IMPLANTER USING AN IMAGING DEVICE
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Patent #:
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Issue Dt:
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08/26/2008
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Application #:
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11390039
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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METHOD OF MEASURING ION BEAM POSITION
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11409759
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Filing Dt:
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04/24/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Title:
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LOAD LOCK CONTROL
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11432923
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Filing Dt:
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05/12/2006
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Publication #:
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Pub Dt:
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11/15/2007
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Title:
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COMBINATION LOAD LOCK FOR HANDLING WORKPIECES
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Patent #:
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Issue Dt:
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05/20/2008
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Application #:
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11432977
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Filing Dt:
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05/12/2006
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Publication #:
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Pub Dt:
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11/15/2007
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Title:
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RIBBON BEAM ION IMPLANTER CLUSTER TOOL
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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11437547
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Filing Dt:
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05/19/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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ION SOURCE
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Patent #:
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Issue Dt:
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03/24/2009
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Application #:
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11441609
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Filing Dt:
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05/26/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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SYSTEM AND METHOD OF ION BEAM CONTROL IN RESPONSE TO A BEAM GLITCH
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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11445667
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Title:
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PARTICULATE PREVENTION IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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11445677
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Title:
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CHARGED BEAM DUMP AND PARTICLE ATTRACTOR
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Patent #:
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Issue Dt:
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08/25/2009
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Application #:
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11445722
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Title:
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BEAM STOP AND BEAM TUNING METHODS
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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11503685
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Filing Dt:
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08/14/2006
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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THROUGHPUT ENHANCEMENT FOR SCANNED BEAM ION IMPLANTERS
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