Patent Assignment Details
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Reel/Frame: | 018161/0278 | |
| Pages: | 2 |
| | Recorded: | 08/23/2006 | | |
Attorney Dkt #: | 2001P11900US02 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10786996
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Filing Dt:
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02/25/2004
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Publication #:
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Pub Dt:
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11/11/2004
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Title:
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METHOD OF REMOVING PECVD RESIDUES OF FLUORINATED PLASMA USING IN-SITU H2 PLASMA
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Assignee
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6000 TECHNOLOGY BOULEVARD |
SANDSTON, VIRGINIA 23150 |
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Correspondence name and address
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HEATHER ROWLAND
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3000 CENTREGREEN WAY
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CARY, NC 27513
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