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Reel/Frame:	056465/0280			Pages:	23
		Recorded:	03/04/2021
Attorney Dkt #:	ASMEX.001GEN
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 207
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Patent #:	7498242	Issue Dt:	03/03/2009	Application #:	11359884	Filing Dt:	02/21/2006
Publication #:	US20060216932	Pub Dt:	09/28/2006
Title:	PLASMA PRE-TREATING SURFACES FOR ATOMIC LAYER DEPOSITION

Patent #:	8088223	Issue Dt:	01/03/2012	Application #:	11373408	Filing Dt:	03/09/2006
Publication #:	US20060216417	Pub Dt:	09/28/2006
Title:	SYSTEM FOR CONTROL OF GAS INJECTORS

Patent #:	7608549	Issue Dt:	10/27/2009	Application #:	11375588	Filing Dt:	03/13/2006
Publication #:	US20070026540	Pub Dt:	02/01/2007
Title:	METHOD OF FORMING NON-CONFORMAL LAYERS

Patent #:	7901968	Issue Dt:	03/08/2011	Application #:	11388313	Filing Dt:	03/23/2006
Publication #:	US20070224787	Pub Dt:	09/27/2007
Title:	HETEROEPITAXIAL DEPOSITION OVER AN OXIDIZED SURFACE

Patent #:	7465658	Issue Dt:	12/16/2008	Application #:	11411430	Filing Dt:	04/25/2006
Publication #:	US20060258150	Pub Dt:	11/16/2006
Title:	OXYGEN BRIDGE STRUCTURES AND METHODS TO FORM OXYGEN BRIDGE STRUCTURES

Patent #:	7601224	Issue Dt:	10/13/2009	Application #:	11424638	Filing Dt:	06/16/2006
Publication #:	US20060222481	Pub Dt:	10/05/2006
Title:	METHOD OF SUPPORTING A SUBSTRATE IN A GAS CUSHION SUSCEPTOR SYSTEM

Patent #:	7370848	Issue Dt:	05/13/2008	Application #:	11428267	Filing Dt:	06/30/2006
Publication #:	US20060237861	Pub Dt:	10/26/2006
Title:	BUBBLER FOR SUBSTRATE PROCESSING

Patent #:	7476627	Issue Dt:	01/13/2009	Application #:	11431037	Filing Dt:	05/09/2006
Publication #:	US20060205230	Pub Dt:	09/14/2006
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION

Patent #:	7462239	Issue Dt:	12/09/2008	Application #:	11433535	Filing Dt:	05/12/2006
Publication #:	US20060201414	Pub Dt:	09/14/2006
Title:	LOW TEMPERATURE LOAD AND BAKE

Patent #:	7648853	Issue Dt:	01/19/2010	Application #:	11485047	Filing Dt:	07/11/2006
Publication #:	US20080014721	Pub Dt:	01/17/2008
Title:	DUAL CHANNEL HETEROSTRUCTURE

Patent #:	7795160	Issue Dt:	09/14/2010	Application #:	11490875	Filing Dt:	07/21/2006
Publication #:	US20080020593	Pub Dt:	01/24/2008
Title:	ALD OF METAL SILICATE FILMS

Patent #:	7608526	Issue Dt:	10/27/2009	Application #:	11491616	Filing Dt:	07/24/2006
Publication #:	US20080017952	Pub Dt:	01/24/2008
Title:	STRAINED LAYERS WITHIN SEMICONDUCTOR BUFFER STRUCTURES

Patent #:	7597574	Issue Dt:	10/06/2009	Application #:	11502935	Filing Dt:	08/11/2006
Publication #:	US20080038950	Pub Dt:	02/14/2008
Title:	LAMP FASTENERS FOR SEMICONDUCTOR PROCESSING REACTORS

Patent #:	7402504	Issue Dt:	07/22/2008	Application #:	11506320	Filing Dt:	08/18/2006
Publication #:	US20060281322	Pub Dt:	12/14/2006
Title:	EPITAXIAL SEMICONDUCTOR DEPOSITION METHODS AND STRUCTURES

Patent #:	8278176	Issue Dt:	10/02/2012	Application #:	11536463	Filing Dt:	09/28/2006
Publication #:	US20070287272	Pub Dt:	12/13/2007
Title:	SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTOR FILMS

Patent #:	7799135	Issue Dt:	09/21/2010	Application #:	11539312	Filing Dt:	10/06/2006
Publication #:	US20070084404	Pub Dt:	04/19/2007
Title:	REACTOR SURFACE PASSIVATION THROUGH CHEMICAL DEACTIVATION

Patent #:	7571893	Issue Dt:	08/11/2009	Application #:	11560771	Filing Dt:	11/16/2006
Publication #:	US20080116411	Pub Dt:	05/22/2008
Title:	VALVE WITH HIGH TEMPERATURE RATING

Patent #:	7914847	Issue Dt:	03/29/2011	Application #:	11565478	Filing Dt:	11/30/2006
Publication #:	US20070098894	Pub Dt:	05/03/2007
Title:	REACTOR SURFACE PASSIVATION THROUGH CHEMICAL DEACTIVATION

Patent #:	7595271	Issue Dt:	09/29/2009	Application #:	11566124	Filing Dt:	12/01/2006
Publication #:	US20070128877	Pub Dt:	06/07/2007
Title:	POLYMER COATING FOR VAPOR DEPOSITION TOOL

Patent #:	7611751	Issue Dt:	11/03/2009	Application #:	11591845	Filing Dt:	11/01/2006
Publication #:	US20080102204	Pub Dt:	05/01/2008
Title:	VAPOR DEPOSITION OF METAL CARBIDE FILMS

Patent #:	7727864	Issue Dt:	06/01/2010	Application #:	11591927	Filing Dt:	11/01/2006
Publication #:	US20080102613	Pub Dt:	05/01/2008
Title:	CONTROLLED COMPOSITION USING PLASMA-ENHANCED ATOMIC LAYER DEPOSITION

Patent #:	8921205	Issue Dt:	12/30/2014	Application #:	11626730	Filing Dt:	01/24/2007
Publication #:	US20070117359	Pub Dt:	05/24/2007
Title:	DEPOSITION OF AMORPHOUS SILICON-CONTAINING FILMS

Patent #:	7595270	Issue Dt:	09/29/2009	Application #:	11627597	Filing Dt:	01/26/2007
Publication #:	US20080182410	Pub Dt:	07/31/2008
Title:	PASSIVATED STOICHIOMETRIC METAL NITRIDE FILMS

Patent #:	7598170	Issue Dt:	10/06/2009	Application #:	11627749	Filing Dt:	01/26/2007
Publication #:	US20080182411	Pub Dt:	07/31/2008
Title:	PLASMA-ENHANCED ALD OF TANTALUM NITRIDE FILMS

Patent #:	8067297	Issue Dt:	11/29/2011	Application #:	11642167	Filing Dt:	12/20/2006
Publication #:	US20070102790	Pub Dt:	05/10/2007
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	7863163	Issue Dt:	01/04/2011	Application #:	11644673	Filing Dt:	12/22/2006
Publication #:	US20070161216	Pub Dt:	07/12/2007
Title:	EPITAXIAL DEPOSITION OF DOPED SEMICONDUCTOR MATERIALS

Patent #:	7799680	Issue Dt:	09/21/2010	Application #:	11651324	Filing Dt:	01/09/2007
Publication #:	US20070111521	Pub Dt:	05/17/2007
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION ON GERMANIUM

Patent #:	7918938	Issue Dt:	04/05/2011	Application #:	11654372	Filing Dt:	01/17/2007
Publication #:	US20080202416	Pub Dt:	08/28/2008
Title:	HIGH TEMPERATURE ALD INLET MANIFOLD

Patent #:	7725012	Issue Dt:	05/25/2010	Application #:	11655556	Filing Dt:	01/19/2007
Publication #:	US20080175571	Pub Dt:	07/24/2008
Title:	MOVABLE RADIANT HEAT SOURCES

Patent #:	7674728	Issue Dt:	03/09/2010	Application #:	11693556	Filing Dt:	03/29/2007
Publication #:	US20070166966	Pub Dt:	07/19/2007
Title:	DEPOSITION FROM LIQUID SOURCES

Patent #:	7585142	Issue Dt:	09/08/2009	Application #:	11724853	Filing Dt:	03/16/2007
Publication #:	US20080226428	Pub Dt:	09/18/2008
Title:	SUBSTRATE HANDLING CHAMBER WITH MOVABLE SUBSTRATE CARRIER LOADING PLATFORM

Patent #:	7713874	Issue Dt:	05/11/2010	Application #:	11743574	Filing Dt:	05/02/2007
Publication #:	US20080274617	Pub Dt:	11/06/2008
Title:	PERIODIC PLASMA ANNEALING IN AN ALD-TYPE PROCESS

Patent #:	7682947	Issue Dt:	03/23/2010	Application #:	11755528	Filing Dt:	05/30/2007
Publication #:	US20070224786	Pub Dt:	09/27/2007
Title:	EPITAXIAL SEMICONDUCTOR DEPOSITION METHODS AND STRUCTURES

Patent #:	7547615	Issue Dt:	06/16/2009	Application #:	11843552	Filing Dt:	08/22/2007
Publication #:	US20080014725	Pub Dt:	01/17/2008
Title:	DEPOSITION OVER MIXED SUBSTRATES USING TRISILANE

Patent #:	7893433	Issue Dt:	02/22/2011	Application #:	11854163	Filing Dt:	09/12/2007
Publication #:	US20080073645	Pub Dt:	03/27/2008
Title:	THIN FILMS AND METHODS OF MAKING THEM

Patent #:	7759199	Issue Dt:	07/20/2010	Application #:	11858054	Filing Dt:	09/19/2007
Publication #:	US20090075029	Pub Dt:	03/19/2009
Title:	STRESSOR FOR ENGINEERED STRAIN ON CHANNEL

Patent #:	7479443	Issue Dt:	01/20/2009	Application #:	11867318	Filing Dt:	10/04/2007
Publication #:	US20080017101	Pub Dt:	01/24/2008
Title:	GERMANIUM DEPOSITION

Patent #:	7972977	Issue Dt:	07/05/2011	Application #:	11868333	Filing Dt:	10/05/2007
Publication #:	US20080085610	Pub Dt:	04/10/2008
Title:	ALD OF METAL SILICATE FILMS

Patent #:	8137462	Issue Dt:	03/20/2012	Application #:	11870374	Filing Dt:	10/10/2007
Publication #:	US20080085226	Pub Dt:	04/10/2008
Title:	PRECURSOR DELIVERY SYSTEM

Patent #:	8268409	Issue Dt:	09/18/2012	Application #:	11873250	Filing Dt:	10/16/2007
Publication #:	US20080113110	Pub Dt:	05/15/2008
Title:	PLASMA-ENHANCED DEPOSITION OF METAL CARBIDE FILMS

Patent #:	7651953	Issue Dt:	01/26/2010	Application #:	11877480	Filing Dt:	10/23/2007
Publication #:	US20080038936	Pub Dt:	02/14/2008
Title:	METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS

Patent #:	8067061	Issue Dt:	11/29/2011	Application #:	11924418	Filing Dt:	10/25/2007
Publication #:	US20090110826	Pub Dt:	04/30/2009
Title:	REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS

Patent #:	7939447	Issue Dt:	05/10/2011	Application #:	11925518	Filing Dt:	10/26/2007
Publication #:	US20090111246	Pub Dt:	04/30/2009
Title:	INHIBITORS FOR SELECTIVE DEPOSITION OF SILICON CONTAINING FILMS

Patent #:	7772097	Issue Dt:	08/10/2010	Application #:	11935174	Filing Dt:	11/05/2007
Publication #:	US20090117717	Pub Dt:	05/07/2009
Title:	METHODS OF SELECTIVELY DEPOSITING SILICON-CONTAINING FILMS

Patent #:	7993057	Issue Dt:	08/09/2011	Application #:	11961671	Filing Dt:	12/20/2007
Publication #:	US20090159000	Pub Dt:	06/25/2009
Title:	REDUNDANT TEMPERATURE SENSOR FOR SEMICONDUCTOR PROCESSING CHAMBERS

Patent #:	7655543	Issue Dt:	02/02/2010	Application #:	11963627	Filing Dt:	12/21/2007
Publication #:	US20090163001	Pub Dt:	06/25/2009
Title:	SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS

Patent #:	8367548	Issue Dt:	02/05/2013	Application #:	12035373	Filing Dt:	02/21/2008
Publication #:	US20080224317	Pub Dt:	09/18/2008
Title:	STABLE SILICIDE FILMS AND METHODS FOR MAKING THE SAME

Patent #:	9139906	Issue Dt:	09/22/2015	Application #:	12038764	Filing Dt:	02/27/2008
Publication #:	US20090214767	Pub Dt:	08/27/2009
Title:	DOPING WITH ALD TECHNOLOGY

Patent #:	8383525	Issue Dt:	02/26/2013	Application #:	12109859	Filing Dt:	04/25/2008
Publication #:	US20090269941	Pub Dt:	10/29/2009
Title:	PLASMA-ENHANCED DEPOSITION PROCESS FOR FORMING A METAL OXIDE THIN FILM AND RELATED STRUCTURES

Patent #:	7666474	Issue Dt:	02/23/2010	Application #:	12116894	Filing Dt:	05/07/2008
Publication #:	US20090280267	Pub Dt:	11/12/2009
Title:	PLASMA-ENHANCED PULSED DEPOSITION OF METAL CARBIDE FILMS

Patent #:	7874726	Issue Dt:	01/25/2011	Application #:	12121085	Filing Dt:	05/15/2008
Publication #:	US20080289574	Pub Dt:	11/27/2008
Title:	THERMOCOUPLE

Patent #:	7946762	Issue Dt:	05/24/2011	Application #:	12140809	Filing Dt:	06/17/2008
Publication #:	US20090308425	Pub Dt:	12/17/2009
Title:	THERMOCOUPLE

Patent #:	7569284	Issue Dt:	08/04/2009	Application #:	12167506	Filing Dt:	07/03/2008
Publication #:	US20080286589	Pub Dt:	11/20/2008
Title:	INCORPORATION OF NITROGEN INTO HIGH K DIELECTRIC FILM

Patent #:	8394229	Issue Dt:	03/12/2013	Application #:	12187933	Filing Dt:	08/07/2008
Publication #:	US20100031884	Pub Dt:	02/11/2010
Title:	SUSCEPTOR RING

Patent #:	7648690	Issue Dt:	01/19/2010	Application #:	12244724	Filing Dt:	10/02/2008
Publication #:	US20090026496	Pub Dt:	01/29/2009
Title:	METHODS OF MAKING SUBSTITUTIONALLY CARBON-DOPED CRYSTALLINE SI-CONTAINING MATERIALS BY CHEMICAL VAPOR DEPOSITION

Patent #:	8765606	Issue Dt:	07/01/2014	Application #:	12251206	Filing Dt:	10/14/2008
Publication #:	US20090042400	Pub Dt:	02/12/2009
Title:	SILICON SURFACE PREPARATION

Patent #:	8809195	Issue Dt:	08/19/2014	Application #:	12254652	Filing Dt:	10/20/2008
Publication #:	US20100099264	Pub Dt:	04/22/2010
Title:	ETCHING HIGH-K MATERIALS

Patent #:	8801857	Issue Dt:	08/12/2014	Application #:	12263345	Filing Dt:	10/31/2008
Publication #:	US20100107973	Pub Dt:	05/06/2010
Title:	SELF-CENTERING SUSCEPTOR RING ASSEMBLY

Patent #:	8047706	Issue Dt:	11/01/2011	Application #:	12273440	Filing Dt:	11/18/2008
Publication #:	US20090147819	Pub Dt:	06/11/2009
Title:	CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESSING CHAMBER

Patent #:	7871937	Issue Dt:	01/18/2011	Application #:	12331322	Filing Dt:	12/09/2008
Publication #:	US20090286406	Pub Dt:	11/19/2009
Title:	PROCESS AND APPARATUS FOR TREATING WAFERS

Patent #:	8216380	Issue Dt:	07/10/2012	Application #:	12350793	Filing Dt:	01/08/2009
Publication #:	US20100173432	Pub Dt:	07/08/2010
Title:	GAP MAINTENANCE FOR OPENING TO PROCESS CHAMBER

Patent #:	8287648	Issue Dt:	10/16/2012	Application #:	12368081	Filing Dt:	02/09/2009
Publication #:	US20100202860	Pub Dt:	08/12/2010
Title:	METHOD AND APPARATUS FOR MINIMIZING CONTAMINATION IN SEMICONDUCTOR PROCESSING CHAMBER

Patent #:	8465801	Issue Dt:	06/18/2013	Application #:	12398938	Filing Dt:	03/05/2009
Publication #:	US20090196992	Pub Dt:	08/06/2009
Title:	GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR

Patent #:	7666799	Issue Dt:	02/23/2010	Application #:	12419251	Filing Dt:	04/06/2009
Publication #:	US20090189185	Pub Dt:	07/30/2009
Title:	EPITAXIAL GROWTH OF RELAXED SILICON GERMANIUM LAYERS

Patent #:	8486191	Issue Dt:	07/16/2013	Application #:	12420010	Filing Dt:	04/07/2009
Publication #:	US20100255658	Pub Dt:	10/07/2010
Title:	SUBSTRATE REACTOR WITH ADJUSTABLE INJECTORS FOR MIXING GASES WITHIN REACTION CHAMBER

Patent #:	9481937	Issue Dt:	11/01/2016	Application #:	12433579	Filing Dt:	04/30/2009
Publication #:	US20100275952	Pub Dt:	11/04/2010
Title:	SELECTIVE ETCHING OF REACTOR SURFACES

Patent #:	8360001	Issue Dt:	01/29/2013	Application #:	12504269	Filing Dt:	07/16/2009
Publication #:	US20100012030	Pub Dt:	01/21/2010
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	7964513	Issue Dt:	06/21/2011	Application #:	12546106	Filing Dt:	08/24/2009
Publication #:	US20090311857	Pub Dt:	12/17/2009
Title:	METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS

Patent #:	9117773	Issue Dt:	08/25/2015	Application #:	12547911	Filing Dt:	08/26/2009
Publication #:	US20110053383	Pub Dt:	03/03/2011
Title:	HIGH CONCENTRATION WATER PULSES FOR ATOMIC LAYER DEPOSITION

Patent #:	8530340	Issue Dt:	09/10/2013	Application #:	12556377	Filing Dt:	09/09/2009
Publication #:	US20100006024	Pub Dt:	01/14/2010
Title:	EPITAXIAL SEMICONDUCTOR DEPOSITION METHODS AND STRUCTURES

Patent #:	7825401	Issue Dt:	11/02/2010	Application #:	12562029	Filing Dt:	09/17/2009
Publication #:	US20100006893	Pub Dt:	01/14/2010
Title:	STRAINED LAYERS WITHIN SEMICONDUCTOR BUFFER STRUCTURES

Patent #:	8334218	Issue Dt:	12/18/2012	Application #:	12573008	Filing Dt:	10/02/2009
Publication #:	US20100022099	Pub Dt:	01/28/2010
Title:	METHOD OF FORMING NON-CONFORMAL LAYERS

Patent #:	8367528	Issue Dt:	02/05/2013	Application #:	12620488	Filing Dt:	11/17/2009
Publication #:	US20110117732	Pub Dt:	05/19/2011
Title:	CYCLICAL EPITAXIAL DEPOSITION AND ETCH

Patent #:	7897491	Issue Dt:	03/01/2011	Application #:	12639388	Filing Dt:	12/16/2009
Publication #:	US20100093159	Pub Dt:	04/15/2010
Title:	SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS

Patent #:	8088225	Issue Dt:	01/03/2012	Application #:	12641712	Filing Dt:	12/18/2009
Publication #:	US20100089314	Pub Dt:	04/15/2010
Title:	SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSITION

Patent #:	8557702	Issue Dt:	10/15/2013	Application #:	12683718	Filing Dt:	01/07/2010
Publication #:	US20100193955	Pub Dt:	08/05/2010
Title:	PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER DIELECTRIC LAYERS

Patent #:	7921805	Issue Dt:	04/12/2011	Application #:	12691243	Filing Dt:	01/21/2010
Publication #:	US20100107978	Pub Dt:	05/06/2010
Title:	DEPOSITION FROM LIQUID SOURCES

Patent #:	8440048	Issue Dt:	05/14/2013	Application #:	12695072	Filing Dt:	01/27/2010
Publication #:	US20100190343	Pub Dt:	07/29/2010
Title:	LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

Patent #:	9190515	Issue Dt:	11/17/2015	Application #:	12705454	Filing Dt:	02/12/2010
Publication #:	US20100140744	Pub Dt:	06/10/2010
Title:	A STRUCTURE COMPRISES AN AS-DEPOSITED DOPED SINGLE CRYSTALLINE SI-CONTAINING FILM

Patent #:	8293658	Issue Dt:	10/23/2012	Application #:	12707065	Filing Dt:	02/17/2010
Publication #:	US20110198736	Pub Dt:	08/18/2011
Title:	REACTIVE SITE DEACTIVATION AGAINST VAPOR DEPOSITION

Patent #:	8329569	Issue Dt:	12/11/2012	Application #:	12829989	Filing Dt:	07/02/2010
Publication #:	US20110027977	Pub Dt:	02/03/2011
Title:	DEPOSITION OF RUTHENIUM OR RUTHENIUM DIOXIDE

Patent #:	9885123	Issue Dt:	02/06/2018	Application #:	13049763	Filing Dt:	03/16/2011
Publication #:	US20120234230	Pub Dt:	09/20/2012
Title:	RAPID BAKE OF SEMICONDUCTOR SUBSTRATE WITH UPPER LINEAR HEATING ELEMENTS PERPENDICULAR TO HORIZONTAL GAS FLOW

Patent #:	8372201	Issue Dt:	02/12/2013	Application #:	13053014	Filing Dt:	03/21/2011
Publication #:	US20110162580	Pub Dt:	07/07/2011
Title:	HIGH TEMPERATURE ALD INLET MANIFOLD

Patent #:	8809170	Issue Dt:	08/19/2014	Application #:	13111917	Filing Dt:	05/19/2011
Publication #:	US20120295427	Pub Dt:	11/22/2012
Title:	HIGH THROUGHPUT CYCLICAL EPITAXIAL DEPOSITION AND ETCH PROCESS

Patent #:	8563444	Issue Dt:	10/22/2013	Application #:	13175204	Filing Dt:	07/01/2011
Publication #:	US20110256735	Pub Dt:	10/20/2011
Title:	ALD OF METAL SILICATE FILMS

Patent #:	9551069	Issue Dt:	01/24/2017	Application #:	13276515	Filing Dt:	10/19/2011
Publication #:	US20120031340	Pub Dt:	02/09/2012
Title:	REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS

Patent #:	11085112	Issue Dt:	08/10/2021	Application #:	13284231	Filing Dt:	10/28/2011
Publication #:	US20130109192	Pub Dt:	05/02/2013
Title:	SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION

Patent #:	9574268	Issue Dt:	02/21/2017	Application #:	13284738	Filing Dt:	10/28/2011
Title:	PULSED VALVE MANIFOLD FOR ATOMIC LAYER DEPOSITION

Patent #:	8784563	Issue Dt:	07/22/2014	Application #:	13316372	Filing Dt:	12/09/2011
Publication #:	US20120079984	Pub Dt:	04/05/2012
Title:	GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR

Patent #:	9093269	Issue Dt:	07/28/2015	Application #:	13332211	Filing Dt:	12/20/2011
Publication #:	US20130153961	Pub Dt:	06/20/2013
Title:	IN-SITU PRE-CLEAN PRIOR TO EPITAXY

Patent #:	9388492	Issue Dt:	07/12/2016	Application #:	13337604	Filing Dt:	12/27/2011
Publication #:	US20130160709	Pub Dt:	06/27/2013
Title:	VAPOR FLOW CONTROL APPARATUS FOR ATOMIC LAYER DEPOSITION

Patent #:	9593416	Issue Dt:	03/14/2017	Application #:	13404700	Filing Dt:	02/24/2012
Publication #:	US20120156108	Pub Dt:	06/21/2012
Title:	PRECURSOR DELIVERY SYSTEM

Patent #:	9127345	Issue Dt:	09/08/2015	Application #:	13413495	Filing Dt:	03/06/2012
Publication #:	US20130233240	Pub Dt:	09/12/2013
Title:	METHODS FOR DEPOSITING AN EPITAXIAL SILICON GERMANIUM LAYER HAVING A GERMANIUM TO SILICON RATIO GREATER THAN 1:1 USING SILYLGERMANE AND A DILUENT

Patent #:	9312131	Issue Dt:	04/12/2016	Application #:	13485214	Filing Dt:	05/31/2012
Publication #:	US20120244688	Pub Dt:	09/27/2012
Title:	SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTIVE FILMS

Patent #:	9359672	Issue Dt:	06/07/2016	Application #:	13529223	Filing Dt:	06/21/2012
Publication #:	US20120266821	Pub Dt:	10/25/2012
Title:	REACTION SYSTEM FOR GROWING A THIN FILM

Patent #:	8759226	Issue Dt:	06/24/2014	Application #:	13608075	Filing Dt:	09/10/2012
Publication #:	US20130004288	Pub Dt:	01/03/2013
Title:	METHOD FOR MINIMIZING CONTAMINATION IN SEMICONDUCTOR PROCESSING CHAMBER

Patent #:	8927435	Issue Dt:	01/06/2015	Application #:	13889810	Filing Dt:	05/08/2013
Publication #:	US20130239879	Pub Dt:	09/19/2013
Title:	LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

Patent #:	9466574	Issue Dt:	10/11/2016	Application #:	14021994	Filing Dt:	09/09/2013
Publication #:	US20140008803	Pub Dt:	01/09/2014
Title:	PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER DIELECTRIC LAYERS

Patent #:	9631272	Issue Dt:	04/25/2017	Application #:	14069681	Filing Dt:	11/01/2013
Publication #:	US20140127405	Pub Dt:	05/08/2014
Title:	ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDROCARBON COMPOUNDS

100

Patent #:	11387137	Issue Dt:	07/12/2022	Application #:	14447383	Filing Dt:	07/30/2014
Publication #:	US20140338596	Pub Dt:	11/20/2014
Title:	SELF-CENTERING SUSCEPTOR RING ASSEMBLY

Assignor

ASM AMERICA, INC.

Exec Dt:

12/15/2020

Assignee

ASM IP HOLDING B.V.

VERSTERKERSTRAAT 8

ALMERE, NETHERLANDS 1322 AP

Correspondence name and address
	KNOBBE MARTENS OLSON & BEAR LLP
	2040 MAIN STREET
	14TH FLOOR
	IRVINE, CA 92614

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