Patent Assignment Details
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| Reel/Frame: | 032634/0280 | |
| Pages: | 10 |
| | Recorded: | 04/09/2014 | | |
| Attorney Dkt #: | FIS920100175US2 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14080933
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Filing Dt:
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11/15/2013
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Publication #:
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Pub Dt:
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03/13/2014
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Title:
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METHODS TO PREDICT LITHOGRAPHY FOCUS ERROR USING CMP SIMULATED TOPOGRAPHY
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Assignee
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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INTERNATIONAL BUSINESS MACHINES CORP
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2070 ROUTE 52, BLDG. 321 / ZIP 482
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HOPEWELL JCT., NY 12533
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