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Patent #:
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05/02/2006
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Application #:
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10136188
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Filing Dt:
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05/01/2002
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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METHODS OF MANUFACTURING A LITHOGRAPHY TEMPLATE
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10194411
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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FORMATION OF DISCONTINUOUS FILMS DURING AN IMPRINT LITHOGRAPHY PROCESS
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10194414
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY SYSTEMS
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10194991
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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07/01/2004
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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07/12/2005
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Application #:
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10210780
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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ALIGNMENT METHODS FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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10210785
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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SCATTEROMETRY ALIGNMENT FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10210894
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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ALIGNMENT SYSTEMS FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10227105
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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METHOD FOR FABRICATING BULBOUS-SHAPED VIAS
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Patent #:
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Issue Dt:
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01/08/2013
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Application #:
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10264960
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Filing Dt:
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10/04/2002
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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METHOD TO ARRANGE FEATURES ON A SUBSTRATE TO REPLICATE FEATURES HAVING MINIMAL DIMENSIONAL VARIABILITY
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10293223
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Filing Dt:
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11/13/2002
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Publication #:
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Pub Dt:
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05/13/2004
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Title:
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METHOD OF REDUCING PATTERN DISTORTIONS DURING IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10293224
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Filing Dt:
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11/13/2002
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Publication #:
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Pub Dt:
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05/13/2004
| | | | |
Title:
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CHUCKING SYSTEM FOR MODULATING SHAPES OF SUBSTRATES
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10293919
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Filing Dt:
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11/13/2002
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Publication #:
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Pub Dt:
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11/06/2003
| | | | |
Title:
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METHODS OF INSPECTING A LITHOGRAPHY TEMPLATE
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10316963
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Filing Dt:
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12/11/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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METHOD FOR MODULATING SHAPES OF SUBSTRATES
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10318365
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Filing Dt:
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12/12/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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METHOD FOR DETERMINING CHARACTERISTICS OF SUBSTRATE EMPLOYING FLUID GEOMETRIES
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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10375817
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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09/02/2004
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Title:
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METHOD TO REDUCE ADHESION BETWEEN A POLYMERIZABLE LAYER AND A SUBSTRATE EMPLOYING A FLUORINE-CONTAINING LAYER
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10396615
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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09/30/2004
| | | | |
Title:
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POSITIVE TONE BI-LAYER IMPRINT LITHOGRAPHY METHOD
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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10423642
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Filing Dt:
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04/25/2003
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Publication #:
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Pub Dt:
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10/28/2004
| | | | |
Title:
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METHOD OF FORMING STEPPED STRUCTURES EMPLOYING IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10438224
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Filing Dt:
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05/14/2003
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Title:
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METHOD, SYSTEM AND HOLDER FOR TRANSFERRING TEMPLATES DURING IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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01/02/2007
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Application #:
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10463396
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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METHOD TO REDUCE ADHESION BETWEEN A CONFORMABLE REGION AND A PATTERN OF A MOLD
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10614716
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Filing Dt:
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07/07/2003
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Publication #:
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Pub Dt:
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03/10/2005
| | | | |
Title:
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CONFORMING TEMPLATE FOR PATTERNING LIQUIDS DISPOSED ON SUBSTRATES
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10616294
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Filing Dt:
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07/09/2003
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Publication #:
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Pub Dt:
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01/13/2005
| | | | |
Title:
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SYSTEMS FOR MAGNIFICATION AND DISTORTION CORRECTION FOR IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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10645306
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Filing Dt:
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08/21/2003
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Publication #:
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Pub Dt:
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03/24/2005
| | | | |
Title:
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CAPILLARY IMPRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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10670980
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Filing Dt:
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09/25/2003
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Publication #:
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Pub Dt:
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03/31/2005
| | | | |
Title:
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IMPRINT LITHOGRAPHY TEMPLATE HAVING OPAQUE ALIGNMENT MARKS
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Patent #:
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Issue Dt:
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08/15/2006
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Application #:
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10677639
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Filing Dt:
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10/02/2003
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Publication #:
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Pub Dt:
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04/07/2005
| | | | |
Title:
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SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD
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Patent #:
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Issue Dt:
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08/28/2007
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Application #:
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10687562
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Filing Dt:
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10/16/2003
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Publication #:
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Pub Dt:
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04/21/2005
| | | | |
Title:
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APPLYING IMPRINTING MATERIAL TO SUBSTRATES EMPLOYING ELECTROMAGNETIC FIELDS
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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10694284
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Filing Dt:
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10/27/2003
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Publication #:
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Pub Dt:
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05/12/2005
| | | | |
Title:
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METHODS FOR FABRICATING PATTERNED FEATURES UTILIZING IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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10735110
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Filing Dt:
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12/12/2003
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Publication #:
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Pub Dt:
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07/29/2004
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Title:
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MAGNIFICATION CORRECTION EMPLOYING OUT-OF-PLANE DISTORTION OF A SUBSTRATE
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10782187
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Filing Dt:
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02/19/2004
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Publication #:
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Pub Dt:
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08/25/2005
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Title:
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METHOD AND SYSTEM TO MEASURE CHARACTERISTICS OF A FILM DISPOSED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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10784911
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Filing Dt:
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02/23/2004
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Publication #:
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Pub Dt:
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08/25/2005
| | | | |
Title:
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MATERIALS FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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10789319
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Filing Dt:
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02/27/2004
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Publication #:
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Pub Dt:
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09/01/2005
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Title:
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COMPOSITION FOR AN ETCHING MASK COMPRISING A SILICON-CONTAINING MATERIAL
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10833240
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Filing Dt:
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04/27/2004
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Publication #:
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Pub Dt:
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10/27/2005
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Title:
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COMPLIANT HARD TEMPLATE FOR UV IMPRINTING
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10863800
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Filing Dt:
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06/08/2004
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Publication #:
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Pub Dt:
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11/11/2004
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Title:
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SYSTEM FOR DETERMINING CHARACTERISTICS OF SUBSTRATES EMPLOYING FLUID GEOMETRIES
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Patent #:
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Issue Dt:
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01/03/2006
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10864591
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Filing Dt:
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06/09/2004
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Publication #:
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Pub Dt:
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11/11/2004
| | | | |
Title:
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CHUCKING SYSTEM FOR MODULATING SHAPES OF SUBSTRATES
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10868683
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Filing Dt:
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06/15/2004
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Pub Dt:
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12/02/2004
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Title:
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SYSTEM FOR DISPENSING LIQUIDS
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Issue Dt:
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08/31/2010
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10895214
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07/20/2004
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Pub Dt:
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01/26/2006
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Title:
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IMPRINT ALIGNMENT METHOD, SYSTEM, AND TEMPLATE
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09/18/2007
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10898037
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07/23/2004
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04/07/2005
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Title:
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SYSTEM FOR CREATING A TURBULENT FLOW OF FLUID BETWEEN A MOLD AND A SUBSTRATE
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Patent #:
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09/12/2006
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10917563
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08/13/2004
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Pub Dt:
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02/16/2006
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Title:
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METHOD OF PLANARIZING A SEMICONDUCTOR SUBSTRATE WITH AN ETCHING CHEMISTRY
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Patent #:
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Issue Dt:
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12/18/2007
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Application #:
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10917761
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Filing Dt:
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08/13/2004
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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MOAT SYSTEM FOR AN IMPRINT LITHOGRAPHY TEMPLATE
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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10919062
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Filing Dt:
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08/16/2004
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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COMPOSITION TO PROVIDE A LAYER WITH UNIFORM ETCH CHARACTERISTICS
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Patent #:
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Issue Dt:
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05/10/2011
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Application #:
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10919224
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Filing Dt:
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08/16/2004
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Publication #:
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Pub Dt:
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02/16/2006
| | | | |
Title:
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METHOD TO PROVIDE A LAYER WITH UNIFORM ETCH CHARACTERISTICS
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10923628
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Filing Dt:
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08/20/2004
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Publication #:
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Pub Dt:
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02/10/2005
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Title:
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SYSTEM FOR DETERMINING CHARACTERISTICS OF SUBSTRATES EMPLOYING FLUID GEOMETRIES
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10946159
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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METHOD OF PATTERNING SURFACES WHILE PROVIDING GREATER CONTROL OF RECESS ANISOTROPY
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10946565
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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METHOD OF FORMING AN IN-SITU RECESSED STRUCTURE
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Patent #:
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06/16/2009
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10946566
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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PATTERN REVERSAL EMPLOYING THICK RESIDUAL LAYERS
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03/06/2007
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10946570
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09/21/2004
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Pub Dt:
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11/24/2005
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Title:
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METHOD OF FORMING A RECESSED STRUCTURE EMPLOYING A REVERSE TONE PROCESS
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04/17/2007
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10946574
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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PATTERNING SUBSTRATES EMPLOYING MULTI-FILM LAYERS DEFINING ETCH-DIFFERENTIAL INTERFACES
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07/10/2007
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10946577
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09/21/2004
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Pub Dt:
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03/23/2006
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Title:
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REVERSE TONE PATTERNING ON SURFACES HAVING SURFACE PLANARITY PERTURBATIONS
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07/17/2007
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10951014
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09/27/2004
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03/30/2006
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Title:
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METHOD OF COMPENSATING FOR A VOLUMETRIC SHRINKAGE OF A MATERIAL DISPOSED UPON A SUBSTRATE TO FORM A SUBSTANTIALLY PLANAR STRUCTURE THEREFROM
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12/08/2009
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11000321
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11/30/2004
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06/01/2006
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Title:
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INTERFEROMETRIC ANALYSIS METHOD FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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11/06/2007
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11000331
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11/30/2004
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06/15/2006
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Title:
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INTERFEROMETRIC ANALYSIS FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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09/21/2010
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11047428
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01/31/2005
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08/03/2006
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Title:
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CHUCKING SYSTEM FOR NANO-MANUFACTURING
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12/29/2009
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11047499
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01/31/2005
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08/03/2006
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Title:
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METHOD OF RETAINING A SUBSTRATE TO A WAFER CHUCK
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12/11/2007
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11068171
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02/28/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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COMPOSITION TO REDUCE ADHESION BETWEEN A CONFORMABLE REGION AND A MOLD
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11101139
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Filing Dt:
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04/07/2005
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Publication #:
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Pub Dt:
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06/08/2006
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Title:
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SYSTEM FOR CONTROLLING A VOLUME OF MATERIAL ON A MOLD
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11101140
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Filing Dt:
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04/07/2005
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Publication #:
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Pub Dt:
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06/08/2006
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Title:
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METHOD FOR FAST FILLING OF TEMPLATES FOR IMPRINT LITHOGRAPHY USING ON TEMPLATE DISPENSE
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Patent #:
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Issue Dt:
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12/22/2009
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Application #:
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11108208
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Filing Dt:
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04/18/2005
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Publication #:
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Pub Dt:
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08/03/2006
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Title:
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METHOD OF SEPARATING A MOLD FROM A SOLIDIFIED LAYER DISPOSED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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03/04/2008
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Application #:
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11126946
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Filing Dt:
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05/11/2005
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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FORMATION OF DISCONTINUOUS FILMS DURING AN IMPRINT LITHOGRAPHY PROCESS
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11127041
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Filing Dt:
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05/11/2005
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Publication #:
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Pub Dt:
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04/13/2006
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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11/20/2007
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Application #:
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11142808
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
|
01/05/2006
| | | | |
Title:
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SYSTEM FOR VARYING DIMENSIONS OF A SUBSTRATE DURING NANOSCALE MANUFACTURING
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Patent #:
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Issue Dt:
|
09/02/2008
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Application #:
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11142834
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
Title:
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METHOD OF VARYING DIMENSIONS OF A SUBSTRATE DURING NANO-SCALE MANUFACTURING
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Patent #:
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Issue Dt:
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06/17/2008
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Application #:
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11142838
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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12/15/2005
| | | | |
Title:
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COMPLIANT DEVICE FOR NANO-SCALE MANUFACTURING
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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11142839
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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01/05/2006
| | | | |
Title:
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APPARATUS TO VARY DIMENSIONS OF A SUBSTRATE DURING NANO-SCALE MANUFACTURING
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11143092
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Filing Dt:
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06/02/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
Title:
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Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
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Patent #:
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Issue Dt:
|
08/14/2007
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Application #:
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11184664
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Filing Dt:
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07/19/2005
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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METHOD OF CONTROLLING THE CRITICAL DIMENSION OF STRUCTURES FORMED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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07/20/2010
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Application #:
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11187406
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Filing Dt:
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07/22/2005
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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COMPOSITION FOR ADHERING MATERIALS TOGETHER
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Patent #:
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Issue Dt:
|
10/15/2013
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Application #:
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11187407
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Filing Dt:
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07/22/2005
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Publication #:
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Pub Dt:
|
01/25/2007
| | | | |
Title:
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METHOD FOR ADHERING MATERIALS TOGETHER
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Patent #:
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Issue Dt:
|
02/23/2010
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Application #:
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11211766
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Filing Dt:
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08/25/2005
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Publication #:
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Pub Dt:
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03/29/2007
| | | | |
Title:
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SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11231580
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Filing Dt:
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09/21/2005
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Publication #:
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|
Pub Dt:
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03/22/2007
| | | | |
Title:
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METHOD TO CONTROL AN ATMOSTPHERE BETWEEN A BODY AND A SUBSTRATE
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11231616
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Filing Dt:
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09/21/2005
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Publication #:
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|
Pub Dt:
|
03/22/2007
| | | | |
Title:
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SYSTEM TO CONTROL AN ATMOSPHERE BETWEEN A BODY AND A SUBSTRATE
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Patent #:
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Issue Dt:
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08/21/2007
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Application #:
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11240708
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Filing Dt:
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09/30/2005
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Publication #:
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|
Pub Dt:
|
04/05/2007
| | | | |
Title:
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ETCHING TECHNIQUE TO PLANARIZE A MULTI-LAYER STRUCTURE
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Patent #:
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Issue Dt:
|
11/23/2010
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Application #:
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11244428
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Filing Dt:
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10/05/2005
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Publication #:
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|
Pub Dt:
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08/10/2006
| | | | |
Title:
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METHOD OF PROVIDING DESIRABLE WETTING AND RELEASE CHARACTERSTICS BETWEEN A MOLD AND A POLYMERIZABLE COMPOSITION
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Patent #:
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Issue Dt:
|
04/15/2008
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Application #:
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11292394
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Filing Dt:
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11/30/2005
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Publication #:
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|
Pub Dt:
|
06/01/2006
| | | | |
Title:
|
ELIMINATING PRINTABILITY OF SUB-RESOLUTION DEFECTS IN IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
|
09/28/2010
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Application #:
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11292568
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Filing Dt:
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12/01/2005
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Publication #:
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Pub Dt:
|
06/07/2007
| | | | |
Title:
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TECHNIQUE FOR SEPARATING A MOLD FROM SOLIDIFIED IMPRINTING MATERIAL
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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11298244
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Filing Dt:
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12/09/2005
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Publication #:
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Pub Dt:
|
05/11/2006
| | | | |
Title:
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METHOD OF FORMING A COMPLIANT TEMPLATE FOR UV IMPRINTING
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11303777
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Filing Dt:
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12/16/2005
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Publication #:
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Pub Dt:
|
06/07/2007
| | | | |
Title:
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BIFURCATED CONTACT PRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11347198
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Filing Dt:
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02/03/2006
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Publication #:
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Pub Dt:
|
07/20/2006
| | | | |
Title:
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SCATTEROMETRY ALIGNMENT FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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11389731
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Filing Dt:
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03/27/2006
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Publication #:
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|
Pub Dt:
|
08/10/2006
| | | | |
Title:
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IMPRINT LITHOGRAPHY SUBSTRATE PROCESSING TOOL FOR MODULATING SHAPES OF SUBSTRATES
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Patent #:
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Issue Dt:
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02/17/2009
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Application #:
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11470829
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Filing Dt:
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09/07/2006
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Publication #:
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|
Pub Dt:
|
02/01/2007
| | | | |
Title:
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FORMATION OF CONDUCTIVE TEMPLATES EMPLOYING INDIUM TIN OXIDE
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11508765
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Filing Dt:
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08/23/2006
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Publication #:
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Pub Dt:
|
04/24/2008
| | | | |
Title:
|
COMPOSITION FOR AN ETCHING MASK COMPRISING A SILICON-CONTAINING MATERIAL
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Patent #:
|
NONE
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Issue Dt:
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|
Application #:
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11560266
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Filing Dt:
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11/15/2006
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Publication #:
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|
Pub Dt:
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05/15/2008
| | | | |
Title:
|
Methods and Compositions for Providing Preferential Adhesion and Release of Adjacent Surfaces
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Patent #:
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Issue Dt:
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08/28/2007
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Application #:
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11560928
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Filing Dt:
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11/17/2006
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Publication #:
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Pub Dt:
|
05/03/2007
| | | | |
Title:
|
POSITIVE TONE BI-LAYER IMPRINT LITHOGRAPHY METHOD
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|
Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11565350
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Filing Dt:
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11/30/2006
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Publication #:
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Pub Dt:
|
06/14/2007
| | | | |
Title:
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METHOD AND SYSTEM FOR DOUBLE-SIDED PATTERNING OF SUBSTRATES
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11565393
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Filing Dt:
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11/30/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD
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Patent #:
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Issue Dt:
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07/19/2011
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Application #:
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11608374
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Filing Dt:
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12/08/2006
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Publication #:
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Pub Dt:
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06/21/2007
| | | | |
Title:
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METHOD FOR CONTROLLING DISTRIBUTION OF FLUID COMPONENTS ON A BODY
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11611287
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Filing Dt:
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12/15/2006
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Publication #:
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Pub Dt:
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04/12/2007
| | | | |
Title:
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METHOD OF FORMING A RECESSED STRUCTURE EMPLOYING A REVERSE TONE PROCESS
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11625082
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Filing Dt:
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01/19/2007
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Publication #:
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Pub Dt:
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07/26/2007
| | | | |
Title:
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PATTERNING SUBSTRATES EMPLOYING MULTIPLE CHUCKS
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11669569
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Filing Dt:
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01/31/2007
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Publication #:
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Pub Dt:
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05/31/2007
| | | | |
Title:
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CONFORMING TEMPLATE FOR PATTERNING LIQUIDS DISPOSED ON SUBSTRATES
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Patent #:
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Issue Dt:
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12/22/2009
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Application #:
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11690480
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Filing Dt:
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03/23/2007
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Publication #:
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Pub Dt:
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08/16/2007
| | | | |
Title:
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CHUCKING SYSTEM COMPRISING AN ARRAY OF FLUID CHAMBERS
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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11692450
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Filing Dt:
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03/28/2007
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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PATTERNING A PLURALITY OF FIELDS ON A SUBSTRATE TO COMPENSATE FOR DIFFERING EVAPORATION TIMES
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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11693236
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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10/18/2007
| | | | |
Title:
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SELF-ALIGNED PROCESS FOR FABRICATING IMPRINT TEMPLATES CONTAINING VARIOUSLY ETCHED FEATURES
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Patent #:
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Issue Dt:
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09/28/2010
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Application #:
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11694500
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Filing Dt:
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03/30/2007
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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IMPRINTING OF PARTIAL FIELDS AT THE EDGE OF THE WAFER
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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11694612
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Filing Dt:
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03/30/2007
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Publication #:
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Pub Dt:
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10/25/2007
| | | | |
Title:
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Tesselated Patterns in Imprint Lithography
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11695263
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Filing Dt:
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04/02/2007
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Publication #:
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Pub Dt:
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11/29/2007
| | | | |
Title:
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PARTIAL VACUUM ENVIRONMENT IMPRINTING
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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11695469
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Filing Dt:
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04/02/2007
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Publication #:
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Pub Dt:
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12/13/2007
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Title:
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METHOD FOR OBTAINING FORCE COMBINATIONS FOR TEMPLATE DEFORMATION USING NULLSPACE AND METHODS OPTIMIZATION TECHNIQUES
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Patent #:
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Issue Dt:
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08/24/2010
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Application #:
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11695850
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Filing Dt:
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04/03/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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METHOD OF CONCURRENTLY PATTERNING A SUBSTRATE HAVING A PLURALITY OF FIELDS AND A PLURALITY OF ALIGNMENT MARKS
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Patent #:
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Issue Dt:
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08/19/2014
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Application #:
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11734542
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Filing Dt:
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04/12/2007
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Publication #:
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Pub Dt:
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09/13/2007
| | | | |
Title:
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METHOD FOR IMPRINT LITHOGRAPHY UTILIZING AN ADHESION PRIMER LAYER
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Patent #:
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Issue Dt:
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12/21/2010
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Application #:
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11737301
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Filing Dt:
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04/19/2007
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Publication #:
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Pub Dt:
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10/25/2007
| | | | |
Title:
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METHOD FOR DETECTING A PARTICLE IN A NANOIMPRINT LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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11749909
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Filing Dt:
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05/17/2007
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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METHOD FOR EXPELLING GAS POSITIONED BETWEEN A SUBSTRATE AND A MOLD
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11762378
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Filing Dt:
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06/13/2007
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Publication #:
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Pub Dt:
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10/18/2007
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Title:
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IMPRINT LITHOGRAPHY TEMPLATE TO FACILITATE CONTROL OF LIQUID MOVEMENT
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11844824
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Filing Dt:
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08/24/2007
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Publication #:
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Pub Dt:
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05/22/2008
| | | | |
Title:
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POSITIVE TONE BI-LAYER METHOD
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