Patent Assignment Details
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Reel/Frame: | 007670/0282 | |
| Pages: | 2 |
| | Recorded: | 08/28/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08519708
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Filing Dt:
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08/28/1995
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Title:
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METHOD AND APPARATUS FOR IN SITU REMOVAL OF CONTAMINANTS FROM ION BEAM NEUTRALIZATION AND IMPLANTATION APPARATUSES
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Assignee
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1111 SUPERIOR AVENUE |
CLEVELAND, OHIO 44114 |
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Correspondence name and address
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WATTS, HOFFMANN, FISHER & HEINKE, ET AL
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ATTN: PAUL A. SERBINOWSKI
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SUITE 2850, 100 ERIEVIEW PLAZA
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CLEVELAND, OHIO 44114-1824
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