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Total properties:
11
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Patent #:
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Issue Dt:
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08/23/2022
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Application #:
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16584695
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Filing Dt:
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09/26/2019
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Publication #:
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Pub Dt:
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04/30/2020
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Title:
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METHODS AND APPARATUS FOR CONTROLLING WARPAGE IN WAFER LEVEL PACKAGING PROCESSES
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Patent #:
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Issue Dt:
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01/23/2024
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Application #:
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16857828
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Filing Dt:
|
04/24/2020
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Publication #:
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Pub Dt:
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10/28/2021
| | | | |
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Title:
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METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17176839
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Filing Dt:
|
02/16/2021
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Publication #:
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Pub Dt:
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08/18/2022
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Title:
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METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
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Patent #:
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Issue Dt:
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02/13/2024
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Application #:
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17187218
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Filing Dt:
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02/26/2021
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Publication #:
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Pub Dt:
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09/01/2022
| | | | |
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Title:
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HIGH THROUGHPUT AND METAL CONTAMINATION CONTROL OVEN FOR CHAMBER COMPONENT CLEANING PROCESS
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|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17219082
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Filing Dt:
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03/31/2021
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Publication #:
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Pub Dt:
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10/06/2022
| | | | |
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Title:
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METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL
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|
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Patent #:
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|
Issue Dt:
|
10/10/2023
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Application #:
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17333732
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Filing Dt:
|
05/28/2021
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Publication #:
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Pub Dt:
|
12/01/2022
| | | | |
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Title:
|
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
17351530
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Filing Dt:
|
06/18/2021
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|
Publication #:
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Pub Dt:
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12/22/2022
| | | | |
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Title:
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SEMITRANSPARENT SUBSTRATE SUPPORT FOR MICROWAVE DEGAS CHAMBER
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|
|
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Patent #:
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|
Issue Dt:
|
02/14/2023
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Application #:
|
17351535
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Filing Dt:
|
06/18/2021
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|
Publication #:
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Pub Dt:
|
12/22/2022
| | | | |
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Title:
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PROCESS KIT HAVING TALL DEPOSITION RING AND SMALLER DIAMETER ELECTROSTATIC CHUCK (ESC) FOR PVD CHAMBER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/23/2024
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Application #:
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17369519
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Filing Dt:
|
07/07/2021
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|
Publication #:
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|
Pub Dt:
|
01/12/2023
| | | | |
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Title:
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PRE AND POST PROCESSING METROLOGY APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
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03/12/2024
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Application #:
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17410958
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Filing Dt:
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08/24/2021
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Publication #:
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Pub Dt:
|
03/02/2023
| | | | |
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Title:
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LOW WARPAGE CURING METHODOLOGY BY INDUCING CURVATURE
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|
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Patent #:
|
|
Issue Dt:
|
12/12/2023
|
Application #:
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29782632
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Filing Dt:
|
05/07/2021
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|
Title:
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TARGET PROFILE FOR A PHYSICAL VAPOR DEPOSITION CHAMBER TARGET
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|
