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Patent #:
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Issue Dt:
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07/20/1993
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Application #:
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07361545
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Filing Dt:
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06/05/1989
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Title:
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JUMPING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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04/07/1992
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Application #:
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07527559
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Filing Dt:
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05/23/1990
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Title:
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A SCANNING PROBE MICROSCOPE EMPLOYING ADJUSTABLE TILT AND A UNITARY HEAD
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Patent #:
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Issue Dt:
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12/31/1991
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Application #:
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07558225
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Filing Dt:
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07/26/1990
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Title:
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DRIFT COMPENSATION FOR SCANNING PROBE MICROSCOPES USING AN ENHANCED PROBE POSITIONING SYSTEM
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Patent #:
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Issue Dt:
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01/14/1992
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Application #:
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07565713
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Filing Dt:
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08/13/1990
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Title:
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METHOD OF OPERATING A SCANNING PROBE MICROSCOPE TO IMPROVE DRIFT CHARACTERISTICS
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Patent #:
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Issue Dt:
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08/24/1993
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Application #:
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07707292
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Filing Dt:
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05/30/1991
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Title:
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ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07793245
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Filing Dt:
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11/12/1991
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Title:
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SCANNER FOR SCANNING PROBE MICROSCOPES HAVING REDUCED Z-AXIS NON-LINEARITY
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Patent #:
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Issue Dt:
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07/06/1993
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Application #:
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07831876
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Filing Dt:
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02/06/1992
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Title:
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ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07835577
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Filing Dt:
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02/14/1992
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Title:
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METHOD OF ADJUSTING THE SIZE OF THE AREA SCANNED BY A SCANNING PROBE
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Patent #:
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Issue Dt:
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10/19/1993
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Application #:
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07883043
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Filing Dt:
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05/07/1992
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Title:
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ATOMIC FORCE MICROSCOPE FOR SMALL SAMPLES HAVING DUAL-MODE OPERATING CAPABILITY
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Patent #:
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Issue Dt:
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05/09/1995
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Application #:
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07926175
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Filing Dt:
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08/07/1992
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Title:
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A TAPPING ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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04/26/1994
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Application #:
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07947831
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Filing Dt:
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09/21/1992
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Title:
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POSITIONING DEVICE FOR SCANNING PROBE MICROSCOPES
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Patent #:
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Issue Dt:
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05/24/1994
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Application #:
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07970875
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Filing Dt:
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11/03/1992
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Title:
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STIFFNESS ENHANCER FOR MOVABLE STAGE ASSEMBLY
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Patent #:
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Issue Dt:
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03/28/1995
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Application #:
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07974603
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Filing Dt:
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11/12/1992
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Title:
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METHODS OF OPERATING ATOMIC FORCE MICROSCOPES TO MEASURE FRICTION
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Patent #:
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Issue Dt:
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05/03/1994
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Application #:
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07982871
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Filing Dt:
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11/30/1992
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Title:
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AN IMPROVED SCANNING PROBE MICROSCOPE USING STORED DATA FOR VERTICAL PROBE POSITIONING
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Patent #:
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Issue Dt:
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11/30/1993
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Application #:
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08009076
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Filing Dt:
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01/26/1993
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Title:
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JUMPING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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07/19/1994
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Application #:
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08085053
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Filing Dt:
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07/02/1993
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Title:
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ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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11/07/1995
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Application #:
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08107017
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Filing Dt:
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08/17/1993
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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05/16/1995
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Application #:
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08147571
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Filing Dt:
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11/05/1993
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Title:
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JUMPING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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05/23/1995
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Application #:
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08202287
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Filing Dt:
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02/25/1994
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Title:
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SCANNING PROBE MICROSCOPE USING STORED DATA FOR VERTICAL PROBE POSITIONING
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Patent #:
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Issue Dt:
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06/03/1997
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Application #:
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08368547
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Filing Dt:
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01/04/1995
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Title:
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SUSPENSION ASSEMBLY STATIC ATTITUDE AND DISTANCE MEASURING INSTRUMENT
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Patent #:
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Issue Dt:
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05/21/1996
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Application #:
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08381159
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Filing Dt:
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01/31/1995
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Title:
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TAPPING ATOMIC FORCE MICROSCOPE WITH PHASE OR FREQUENCY DETECTION
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Patent #:
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Issue Dt:
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10/01/1996
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Application #:
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08416100
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Filing Dt:
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04/04/1995
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08428358
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Filing Dt:
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04/21/1995
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Title:
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SCANNING PROBE MICROSCOPE HAVING A SINGLE VIEWING DEVICE FOR ON-AXIS AND OBLIQUE OPTICAL VIEWS
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08502368
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Filing Dt:
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07/14/1995
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Title:
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METHODS OF OPERATING ATOMIC FORCE MICROSCOPES TO MEASURE FRICTION
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Patent #:
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Issue Dt:
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09/02/1997
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Application #:
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08542437
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Filing Dt:
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10/12/1995
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Title:
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HIGH RESOLUTION FIBER OPTIC PROBE FOR NEAR FIELD OPTICAL MICROSCOPY AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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08/18/1998
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Application #:
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08601600
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Filing Dt:
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02/14/1996
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Title:
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ALL-FIBER, HIGH-SENSITIVITY, NEAR-FIELD OPTICAL MICROSCOPY INSTRUMENT EMPLOYING GUIDED WAVE LIGHT COLLECTOR AND SPECIMEN SUPPORT
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Patent #:
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Issue Dt:
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02/03/1998
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Application #:
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08679332
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Filing Dt:
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07/11/1996
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08777655
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Filing Dt:
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12/31/1996
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Title:
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ATOMIC FORCE MICROSCOPE FOR MEASURING PROPERTIES OF DIELECTRIC AND INSULATING LAYERS
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08794379
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Filing Dt:
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02/04/1997
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Title:
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METHOD AND APPARATUS FOR MEASURING MECHANICAL PROPERTIES ON A SMALL SCALE
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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08898469
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Filing Dt:
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07/22/1997
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Title:
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METHOD AND APPARATUS FOR MEASURING ENERGY DISSIPATION BY A PROBE DURING OPERATION OF AN ATOMIC FORCE MICROSCOPE
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08937494
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Filing Dt:
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09/25/1997
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Title:
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METHOD AND APPARATUS FOR OBTAINING IMPROVED VERTICAL METROLOGY MEASUREMENTS
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Patent #:
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Issue Dt:
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05/25/1999
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Application #:
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08946303
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Filing Dt:
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10/07/1997
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Title:
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FOLDED LOW-POWER INTERFERENCE MICROSCOPE OBJECTIVE
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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08948909
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Filing Dt:
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10/10/1997
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Title:
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SCAN CONTROL FOR SCANNING PROBE MICROSCOPES
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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08984058
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Filing Dt:
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12/03/1997
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Title:
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METHOD FOR IMPROVING THE OPERATION OF OSCILLATING MODE ATOMIC FORCE MICROSCOPES
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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08992310
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Filing Dt:
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12/17/1997
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Title:
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SELECTION PROCESS FOR SEQUENTIALLY COMBINING MULTIPLE SETS OF OVERLAPPING SURFACE-PROFILE INTERFEROMETRIC DATA TO PRODUCE A CONTINUOUS COMPOSITE MAP
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Patent #:
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Issue Dt:
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01/11/2000
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Application #:
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09082320
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Filing Dt:
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05/21/1998
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Title:
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TAPPING ATOMIC FORCE MICROSCOPE WITH PHASE OR FREQUENCY DETECTION
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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09119549
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Filing Dt:
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07/20/1998
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Title:
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SCANNING STYLUS ATOMIC FORCE MICROSCOPE WITH CANTILEVER TRACKING AND OPTICAL ACCESS
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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09121765
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Filing Dt:
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07/23/1998
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Title:
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SYSTEM FOR ELIMINATING SCATTERED LIGHT IN AUTOCOLLIMATOR FOR MAGNETIC-HEAD SUSPENSION MEASURING INSTRUMENT
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09145352
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Filing Dt:
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09/01/1998
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Title:
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METHOD AND APPARATUS FOR DNA SEQUENCING USING A LOCAL SENSITIVE FORCE DETECTOR
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09186742
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Filing Dt:
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11/05/1998
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Title:
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AFM WITH REFERENCED OR DIFFERENTIAL HEIGHT MEASUREMENT
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09188497
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Filing Dt:
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11/09/1998
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Title:
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METHOD AND APPARATUS FOR THE QUANTITATIVE AND OBJECTIVE CORRELATION OF DATA FROM A LOCAL SENSITIVE FORCE DETECTOR
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09189443
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Filing Dt:
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11/10/1998
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Title:
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METHOD AND APPARATUS FOR A LINE BASED, TWO-DIMENSIONAL CHARACTERIZATION OF A THREE-DIMENSIONAL SURFACE
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09240713
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Filing Dt:
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01/29/1999
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Title:
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METHOD AND APPARATUS FOR CLEANING A TIP OF A PROBE OF A PROBE-BASED MEASURING INSTRUMENT
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09280160
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Filing Dt:
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03/29/1999
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09291521
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Filing Dt:
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04/14/1999
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Title:
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DISK-MOUNT DEVICE FOR AUTOMATIC SUCCESSIVE TESTING OF COMPUTER-DRIVE DISK BLANKS BY INTERFEROMETRY
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09354448
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Filing Dt:
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07/15/1999
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Title:
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METHOD AND SYSTEM FOR INCREASING THE ACCURACY OF A PROBE-BASED INSTRUMENT MEASURING A HEATED SAMPLE
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09398698
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Filing Dt:
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09/20/1999
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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Patent #:
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Issue Dt:
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11/27/2001
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Application #:
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09399388
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Filing Dt:
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09/20/1999
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Title:
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HIGH BANDWIDTH RECOILESS MICROACTUATOR
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09452334
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Filing Dt:
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11/30/1999
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Title:
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EMBEDDED INTERFEROMETER FOR REFERENCE-MIRROR CALIBRATION OF INTERFEROMETRIC MICROSCOPE
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09476163
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Filing Dt:
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12/30/1999
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09491000
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Filing Dt:
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01/25/2000
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Title:
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METHOD AND APPARATUS FOR ATOMIC FORCE MICROSCOPY
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09497567
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Filing Dt:
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02/03/2000
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Title:
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AUTOMATED MINIMIZATION OF OPTICAL PATH DIFFERENCE AND REFERENCE MIRROR FOCUS IN WHITE-LIGHT INTERFERENCE MICROSCOPE OBJECTIVE
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09505500
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Filing Dt:
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02/17/2000
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Title:
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PULSED SOURCE SCANNING INTERFEROMETER
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09569131
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Filing Dt:
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05/11/2000
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Title:
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LATERAL-SCANNING INTERFEROMETRIC WITH TILTED OPTICAL AXIS
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09585370
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Filing Dt:
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06/01/2000
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Title:
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ALIGNMENT OF MAGNETIC HEADS FOR AUTOMATIC IDENTIFICATION OF REGIONS OF INTEREST FOR INTERFEROMETRIC MEASUREMENT
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09664141
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Filing Dt:
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09/18/2000
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Title:
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Self-centering crash protection mechanism for interference microscope objective
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09679277
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Filing Dt:
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10/04/2000
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Title:
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REDUCED NOISE SENSITIVITY METHOD AND APPARATUS FOR CONVERTING AN INTERFEROGRAM PHASE
MAP TO A SURFACE PROFILE MAP
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09698919
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Filing Dt:
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10/27/2000
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Title:
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AFM with referenced or differential height measurement
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09731308
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Filing Dt:
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12/06/2000
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Publication #:
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Pub Dt:
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04/19/2001
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Title:
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METHOD AND SYSTEM FOR INCREASING THE ACCURACY OF A PROBE-BASED INSTRUMENT MEASURING A HEATED SAMPLE
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09751728
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Filing Dt:
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12/29/2000
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Title:
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Method and apparatus for high resolution profiling in semiconductor structures
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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09761792
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Filing Dt:
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01/17/2001
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Publication #:
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Pub Dt:
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07/18/2002
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Title:
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METHOD AND APPARATUS FOR REDUCING THE PARACHUTING OF A PROBE
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09766555
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Filing Dt:
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01/19/2001
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Publication #:
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Pub Dt:
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07/25/2002
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Title:
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BALANCED MOMENTUM PROBE HOLDER
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09803268
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Filing Dt:
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03/09/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN METROLOGY APPARATUS
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09824452
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Filing Dt:
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04/02/2001
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Publication #:
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Pub Dt:
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08/16/2001
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09833880
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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BAT-WING ATTENUATION IN WHITE-LIGHT INTERFEROMETRY
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09855960
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Filing Dt:
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05/15/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN A METROLOGY APPARATUS
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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09871287
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Filing Dt:
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05/31/2001
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Publication #:
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Pub Dt:
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12/05/2002
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Title:
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METHOD OF CHARACTERIZING A SEMICONDUCTOR SURFACE
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09875638
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Filing Dt:
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06/06/2001
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Title:
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CORRECTION OF SCANNING ERRORS IN INTERFEROMETRIC PROFILING
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09888826
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Filing Dt:
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06/25/2001
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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SCANNING INTERFEROMETRY WITH REFERENCE SIGNAL
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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09904634
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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METHOD AND APPARATUS FOR MANIPULATING A SAMPLE
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09904913
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Title:
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DYNAMIC ACTIVATION FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10006085
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Filing Dt:
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12/06/2001
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Publication #:
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Pub Dt:
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06/19/2003
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Title:
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FORCE SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10006090
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Filing Dt:
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12/06/2001
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Title:
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MANUAL CONTROL WITH FORCE-FEEDBACK FOR PROBE MICROSCOPY-BASED FORCE SPECTROSCOPY
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10045438
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Filing Dt:
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11/07/2001
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Title:
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APPARATUS AND METHOD TO COMPENSATE FOR STRESS IN A MICROCANTILEVER
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Patent #:
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Issue Dt:
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01/02/2007
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Application #:
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10052921
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Filing Dt:
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11/09/2001
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Title:
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SCANNING ELECTROCHEMICAL POTENTIAL MICROSCOPE
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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10101987
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Filing Dt:
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03/19/2002
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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VERTICAL PROBE CARD FOR ATTACHMENT WITHIN A CENTRAL CORRIDOR OF A MAGNETIC FIELD GENERATOR
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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10109361
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Filing Dt:
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03/28/2002
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Title:
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REFERENCE SIGNAL FOR STITCHING OF INTERFEROMETRIC PROFILES
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10139949
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Filing Dt:
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05/06/2002
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Title:
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IMAGE RECONSTRUCTION METHOD
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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10164460
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Filing Dt:
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06/06/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10189108
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Filing Dt:
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07/02/2002
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Title:
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TORSIONAL RESONANCE MODE PROBE-BASED INSTRUMENT AND METHOD
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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10262057
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Filing Dt:
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10/01/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Title:
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ALIGNMENT AND CORRECTION TEMPLATE FOR OPTICAL PROFILOMETRIC MEASUREMENT
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10285013
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Filing Dt:
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10/31/2002
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Publication #:
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Pub Dt:
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05/06/2004
| | | | |
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Title:
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ENVIRONMENTAL SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10310546
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Filing Dt:
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12/05/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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10345513
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Filing Dt:
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01/16/2003
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Publication #:
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Pub Dt:
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07/22/2004
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Title:
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METHOD OF FABRICATING A SURFACE PROBING DEVICE AND PROBING DEVICE PRODUCED THEREBY
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10417506
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Filing Dt:
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04/17/2003
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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APPARATUS AND METHOD FOR IMPROVING TUNING OF A PROBE-BASED INSTRUMENT
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10426349
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Filing Dt:
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04/30/2003
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Publication #:
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Pub Dt:
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11/04/2004
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Title:
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MICROSCOPE WITH FIXED-ELEMENT AUTOCOLLIMATOR FOR TILT ADJUSTMENT
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Patent #:
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Issue Dt:
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11/11/2008
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Application #:
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10464379
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Filing Dt:
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06/18/2003
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Title:
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SCANNING THERMAL PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10614425
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Filing Dt:
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07/07/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Title:
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BALANCED MOMENTUM PROBE HOLDER
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10624246
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Filing Dt:
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07/22/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN A METROLOGY APPARATUS
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10638963
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Filing Dt:
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08/11/2003
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Publication #:
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Pub Dt:
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02/17/2005
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Title:
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SYSTEM FOR WIDE FREQUENCY DYNAMIC NANOMECHANICAL ANALYSIS
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10752235
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Filing Dt:
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01/06/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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DYNAMIC ACTIVATION FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10756579
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Filing Dt:
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01/13/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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FORCE SCANNING PROBE MICROSCOPE
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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10759686
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Filing Dt:
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01/16/2004
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Publication #:
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Pub Dt:
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07/21/2005
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Title:
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MEASUREMENT OF OBJECT DEFORMATION WITH OPTICAL PROFILER
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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10822352
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04/12/2004
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Publication #:
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Pub Dt:
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10/14/2004
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Title:
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FLEXURE ASSEMBLY FOR A SCANNER
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10844200
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Filing Dt:
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05/12/2004
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Publication #:
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Pub Dt:
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11/17/2005
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Title:
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METHODS OF FABRICATING STRUCTURES FOR CHARACTERIZING TIP SHAPE OF SCANNING PROBE MICROSCOPE PROBES AND STRUCTURES FABRICATED THEREBY
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Patent #:
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Issue Dt:
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10/10/2006
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10869138
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06/16/2004
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12/22/2005
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Title:
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FILM THICKNESS AND BOUNDARY CHARACTERIZATION BY INTERFEROMETRIC PROFILOMETRY
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05/13/2008
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10873064
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06/21/2004
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Pub Dt:
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12/22/2005
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Title:
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PROBES FOR USE IN SCANNING PROBE MICROSCOPES AND METHODS OF FABRICATING SUCH PROBES
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01/30/2007
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10937597
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09/09/2004
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02/10/2005
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Title:
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METHOD AND APPARATUS OF DRIVING TORSIONAL RESONANCE MODE OF A PROBE-BASED INSTRUMENT
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11/28/2006
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10944333
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09/17/2004
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02/24/2005
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IMAGE RECONSTRUCTION METHOD
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03/28/2006
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10966619
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10/15/2004
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Pub Dt:
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03/31/2005
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Title:
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ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD FOR USE THEREOF
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