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Reel/Frame:024638/0294   Pages: 4
Recorded: 07/06/2010
Attorney Dkt #:29756-15
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/19/2016
Application #:
12830810
Filing Dt:
07/06/2010
Publication #:
Pub Dt:
10/28/2010
Title:
APPARATUS AND METHOD FOR REAL TIME MEASUREMENT OF SUBSTRATE TEMPERATURES FOR USE IN SEMICONDUCTOR GROWTH AND WAFER PROCESSING
Assignors
1
Exec Dt:
09/05/2006
2
Exec Dt:
09/05/2006
3
Exec Dt:
09/01/2006
4
Exec Dt:
09/01/2006
5
Exec Dt:
09/01/2006
Assignee
1
2182 BISHOP CIRCLE EAST
DEXTER, MICHIGAN 48130
Correspondence name and address
DICKINSON WRIGHT PLLC
38525 WOODWARD AVENUE
SUITE 2000
BLOOMFIELD HILLS, MI 48304-2970

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