Patent Assignment Details
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| Reel/Frame: | 034715/0300 | |
| Pages: | 5 |
| | Recorded: | 01/14/2015 | | |
| Attorney Dkt #: | KLA P4464 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/17/2019
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Application #:
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14597062
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Filing Dt:
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01/14/2015
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Publication #:
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Pub Dt:
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03/03/2016
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Title:
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Breakdown Analysis of Geometry Induced Overlay and Utilization of Breakdown Analysis for Improved Overlay Control
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
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14301 FNB PARKWAY
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SUITE 220
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OMAHA, NE 68154-5299
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