Total properties:
27
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Patent #:
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Issue Dt:
|
09/19/2000
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Application #:
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09318880
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Filing Dt:
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05/26/1999
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Title:
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METHOD FOR WIDE RANGE GAS FLOW WITH REAL TIME FLOW MEASUREMENT AND CORRECTION
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Patent #:
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Issue Dt:
|
04/17/2001
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Application #:
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09641882
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Filing Dt:
|
08/17/2000
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Title:
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Wide range gas flow system with real time flow measurement and correction
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Patent #:
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Issue Dt:
|
01/18/2011
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Application #:
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11335099
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Filing Dt:
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01/18/2006
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Publication #:
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Pub Dt:
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07/20/2006
| | | | |
Title:
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END POINT DETECTION METHOD FOR PLASMA ETCHING OF SEMICONDUCTOR WAFERS WITH LOW EXPOSED AREA
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Patent #:
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|
Issue Dt:
|
04/13/2010
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Application #:
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11409308
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Filing Dt:
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04/20/2006
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Title:
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USE OF MODELED PARAMETERS FOR REAL-TIME SEMICONDUCTOR PROCESS METROLOGY APPLIED TO SEMICONDUCTOR PROCESSES
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Patent #:
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Issue Dt:
|
01/24/2012
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Application #:
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11525539
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Filing Dt:
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09/21/2006
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Title:
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HIGH-SPEED SECS MESSAGE SERVICES (HSMS) PASS-THROUGH INCLUDING BYPASS
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Patent #:
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Issue Dt:
|
01/18/2011
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Application #:
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11787654
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Filing Dt:
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04/16/2007
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Publication #:
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Pub Dt:
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10/16/2008
| | | | |
Title:
|
SYSTEM AND METHOD FOR CONTROLLING PROCESS END-POINT UTILIZING LEGACY END-POINT SYSTEM
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Patent #:
|
|
Issue Dt:
|
05/03/2011
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Application #:
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11821810
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Filing Dt:
|
06/25/2007
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Title:
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DATA TIMESTAMP MANAGEMENT
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Patent #:
|
|
Issue Dt:
|
07/20/2010
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Application #:
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11855052
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Filing Dt:
|
09/13/2007
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Title:
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TECHNIQUES FOR CALIBRATION OF GAS FLOWS
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Patent #:
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|
Issue Dt:
|
09/15/2009
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Application #:
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11948907
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Filing Dt:
|
11/30/2007
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Title:
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SYSTEM AND METHOD FOR VACUUM CHAMBER LEAK DETECTION
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Patent #:
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Issue Dt:
|
05/10/2011
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Application #:
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12184574
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Filing Dt:
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08/01/2008
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Publication #:
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Pub Dt:
|
07/16/2009
| | | | |
Title:
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METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
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|
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Patent #:
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Issue Dt:
|
11/02/2010
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Application #:
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12354723
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Filing Dt:
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01/15/2009
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Publication #:
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Pub Dt:
|
07/23/2009
| | | | |
Title:
|
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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Patent #:
|
|
Issue Dt:
|
08/14/2012
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Application #:
|
12355654
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Filing Dt:
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01/16/2009
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Publication #:
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Pub Dt:
|
07/23/2009
| | | | |
Title:
|
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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|
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Patent #:
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Issue Dt:
|
03/12/2013
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Application #:
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12509375
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Filing Dt:
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07/24/2009
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Publication #:
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|
Pub Dt:
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01/28/2010
| | | | |
Title:
|
METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN THE PRESENCE OF CHAMBER OUTGASSING
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|
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Patent #:
|
|
Issue Dt:
|
09/18/2012
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Application #:
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12634568
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Filing Dt:
|
12/09/2009
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Publication #:
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|
Pub Dt:
|
06/09/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
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Patent #:
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|
Issue Dt:
|
09/18/2012
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Application #:
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12634593
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Filing Dt:
|
12/09/2009
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Publication #:
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Pub Dt:
|
06/09/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
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|
|
Patent #:
|
|
Issue Dt:
|
09/11/2012
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Application #:
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12634629
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Filing Dt:
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12/09/2009
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Publication #:
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|
Pub Dt:
|
06/09/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
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|
|
Patent #:
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|
Issue Dt:
|
03/11/2014
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Application #:
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12891714
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Filing Dt:
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09/27/2010
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Publication #:
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|
Pub Dt:
|
01/20/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12906058
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Filing Dt:
|
10/15/2010
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Publication #:
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|
Pub Dt:
|
05/12/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR GAS FLOW CONTROL
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|
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Patent #:
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|
Issue Dt:
|
08/07/2012
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Application #:
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13076409
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Filing Dt:
|
03/30/2011
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Publication #:
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|
Pub Dt:
|
07/21/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
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|
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Patent #:
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|
Issue Dt:
|
07/26/2016
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Application #:
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13306940
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Filing Dt:
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11/29/2011
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Publication #:
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Pub Dt:
|
05/31/2012
| | | | |
Title:
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TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS
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|
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Patent #:
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|
Issue Dt:
|
10/14/2014
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Application #:
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13584736
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Filing Dt:
|
08/13/2012
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Publication #:
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Pub Dt:
|
12/06/2012
| | | | |
Title:
|
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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|
|
Patent #:
|
|
Issue Dt:
|
02/27/2018
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Application #:
|
14475472
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Filing Dt:
|
09/02/2014
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Publication #:
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|
Pub Dt:
|
12/18/2014
| | | | |
Title:
|
METHOD AND APPARATUS FOR GAS FLOW CONTROL
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|
|
Patent #:
|
|
Issue Dt:
|
12/20/2016
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Application #:
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14475494
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Filing Dt:
|
09/02/2014
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Publication #:
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|
Pub Dt:
|
12/18/2014
| | | | |
Title:
|
METHOD AND APPARATUS FOR GAS FLOW CONTROL
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
14558946
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Filing Dt:
|
12/03/2014
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Publication #:
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|
Pub Dt:
|
06/09/2016
| | | | |
Title:
|
Mass Flow Controller with Multiple Communication Protocols
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|
|
Patent #:
|
|
Issue Dt:
|
09/03/2019
|
Application #:
|
15206180
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Filing Dt:
|
07/08/2016
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Publication #:
|
|
Pub Dt:
|
01/12/2017
| | | | |
Title:
|
METHOD AND APPARATUS FOR GAS FLOW CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
05/29/2018
|
Application #:
|
15342067
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Filing Dt:
|
11/02/2016
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Publication #:
|
|
Pub Dt:
|
02/23/2017
| | | | |
Title:
|
METHOD AND APPARATUS FOR GAS FLOW CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/2021
|
Application #:
|
16510671
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Filing Dt:
|
07/12/2019
|
Publication #:
|
|
Pub Dt:
|
01/14/2021
| | | | |
Title:
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PRELOADED PIEZO ACTUATOR AND GAS VALVE EMPLOYING THE ACTUATOR
|
|