Patent Assignment Details
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| Reel/Frame: | 015424/0309 | |
| Pages: | 4 |
| | Recorded: | 12/03/2004 | | |
| Attorney Dkt #: | 100133 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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10543848
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Filing Dt:
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07/29/2005
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Publication #:
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Pub Dt:
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09/07/2006
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PCT #:
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US0402908
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Title:
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METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
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Assignee
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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Correspondence name and address
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CABOT MICROELECTRONICS CORPORATION
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STEVEN D. WESEMAN, ESQ.
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ASSOCIATE GENERAL COUNSEL, ET AL.
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870 NORTH COMMONS DRIVE
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AURORA, IL 60504
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