Patent Assignment Details
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| Reel/Frame: | 016945/0312 | |
| Pages: | 5 |
| | Recorded: | 09/02/2005 | | |
| Attorney Dkt #: | Q69946 |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10146915
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Filing Dt:
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05/17/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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MICROLITHOGRAPHIC ILLUMINATION METHOD AND A PROJECTION LENS FOR CARRYING OUT THE METHOD
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Assignee
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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Correspondence name and address
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SUGHRUE MION, PLLC
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2100 PENNSYLVANIA AVENUE, N.W.
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SUITE 800
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WASHINGTON, DC 20037
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