Patent Assignment Details
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| Reel/Frame: | 035252/0325 | |
| Pages: | 2 |
| | Recorded: | 03/25/2015 | | |
| Attorney Dkt #: | 2918.0091C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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14227784
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Filing Dt:
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03/27/2014
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Publication #:
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Pub Dt:
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07/31/2014
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Title:
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EUV MIRROR COMPRISING AN OXYNITRIDE CAPPING LAYER HAVING A STABLE COMPOSITION, EUV LITHOGRAPHY APPARATUS, AND OPERATING METHOD
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Assignee
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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GEORGE F. LEHNIGK
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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