Patent Assignment Details
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Reel/Frame: | 014705/0328 | |
| Pages: | 2 |
| | Recorded: | 11/18/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10615955
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Filing Dt:
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07/10/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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MULTI-CHARGED BEAM LENS, CHARGED-PARTICLE BEAM EXPOSURE APPARATUS USING THE SAME, AND DEVICE MANUFACTURING METHOD
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Assignees
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30-2, SHIMOMARUKO, 3-CHOME, OHTA-KU |
TOKYO, JAPAN |
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6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
TOKYO, JAPAN 101-8010 |
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Correspondence name and address
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FITZPATRICK, CELLA, HARPER & SCINTO
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FRANK A. DELUCIA
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30 ROCKEFELLER PLAZA
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NEW YORK, NY 10112-3800
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