Patent Assignment Details
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Reel/Frame: | 030126/0328 | |
| Pages: | 12 |
| | Recorded: | 04/01/2013 | | |
Attorney Dkt #: | 87720-007400US-679374 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/21/2012
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Application #:
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12960357
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Filing Dt:
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12/03/2010
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Publication #:
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Pub Dt:
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05/24/2012
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Title:
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METHOD AND RESULTING STRUCTURE FOR DEEP TRENCH POLYSILICON HARD MASK REMOVAL
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Assignee
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18 ZHANG JIANG RD., PUDONG NEW AREA |
SHANGHAI, CHINA 201203 |
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Correspondence name and address
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KILPATRICK TOWNSEND & STOCKTON LLP
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TWO EMBARCADERO CENTER
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EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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