Patent Assignment Details
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| Reel/Frame: | 014667/0329 | |
| Pages: | 2 |
| | Recorded: | 11/03/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/25/2006
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Application #:
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10701035
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Filing Dt:
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11/03/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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METHOD AND STRUCTURE FOR FABRICATING PATTERNS ON PHASE SHIFT MASK FOR THE MANUFACTURE OF SEMICONDUCTOR WAFERS
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Assignee
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| 18 ZHANG JIANG ROAD, PUDONG NEW AREA |
| SHANGHAI, CHINA 20123 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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RICHARD T. OGAWA
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TWO EMBARCADERO CENTER, EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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