Total properties:
23
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09208954
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Filing Dt:
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12/08/1998
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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OPTICAL RADIATION MEASUREMENT APPARATUS
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09208955
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Filing Dt:
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12/08/1998
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Title:
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METHOD OF MEASURING ELECTROMAGNETIC RADIATION
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09209735
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Filing Dt:
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12/11/1998
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Title:
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GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09671827
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Filing Dt:
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09/27/2000
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Title:
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METHOD OF PRODUCING A SEMICONDUCTOR SURFACE COVERED WITH FLUORINE
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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09700577
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Filing Dt:
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11/13/2000
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Title:
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METHOD AND APPARATUS DEVICE FOR THE HEAT TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09744880
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Filing Dt:
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04/19/2001
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Title:
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METHOD AND APPARATUS FOR CALIBRATING TEMPERATURE MEASUREMENTS INDEPENDENT OF EMISSIVITY
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09789942
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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08/02/2001
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Title:
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Method of measuring electromagnetic radiation
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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09913269
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Filing Dt:
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11/16/2001
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Title:
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DEVICE AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09979646
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Filing Dt:
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12/13/2001
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Title:
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Apparatus and Method for the Thermal Treatment of Substrates
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10111737
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Filing Dt:
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09/17/2002
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Title:
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METHOD AND APPARATUS FOR THE THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10182594
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10220001
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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08/21/2003
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Title:
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METHOD FOR THE REMOVING OF ADSORBED MOLECULES FROM A CHAMBER
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10276767
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Filing Dt:
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11/18/2002
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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ADJUSTING OF DEFECT PROFILES IN CRYSTAL OR CRYSTALLINE-LIKE STRUCTURES
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Patent #:
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Issue Dt:
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12/05/2006
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Application #:
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10476136
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Filing Dt:
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02/02/2004
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10478754
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Filing Dt:
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04/09/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Title:
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METHOD AND DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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12/05/2006
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Application #:
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10487573
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Filing Dt:
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02/18/2004
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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METHOD FOR THERMALLY TREATING A SUBSTRATE THAT COMPRISES SEVERAL LAYERS
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10524871
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Filing Dt:
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08/15/2005
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Publication #:
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Pub Dt:
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05/18/2006
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Title:
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DEVICE AND METHOD FOR THERMALLY TREATING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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10536788
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Filing Dt:
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05/26/2005
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Publication #:
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Pub Dt:
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02/23/2006
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Title:
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METHOD OF PRODUCING A CALIBRATION WAFER
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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10540613
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Filing Dt:
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08/15/2005
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Publication #:
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Pub Dt:
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05/11/2006
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Title:
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PROCESS FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID HEATING UNIT
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10540614
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Filing Dt:
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06/23/2005
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Publication #:
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Pub Dt:
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06/01/2006
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Title:
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METHOD AND APPARATUS FOR THERMALLY TREATING DISK-SHAPED SUBSTRATES
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10694593
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Filing Dt:
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10/27/2003
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Publication #:
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Pub Dt:
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06/24/2004
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Title:
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METHOD FOR MINIMIZING THE VAPOR DEPOSITION OF TUNGSTEN OXIDE DURING THE SELECTIVE SIDE WALL OXIDATION OF TUNGSTEN-SILICON GATES
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Patent #:
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Issue Dt:
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05/05/2009
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Application #:
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11021915
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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02/09/2006
| | | | |
Title:
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APPARATUS AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
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Patent #:
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Issue Dt:
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05/28/2013
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Application #:
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12251916
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Filing Dt:
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10/15/2008
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Publication #:
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Pub Dt:
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06/04/2009
| | | | |
Title:
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APPARATUS FOR THERMALLY TREATING SEMICONDUCTOR SUBSTRATES
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