Patent Assignment Details
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Reel/Frame: | 009593/0333 | |
| Pages: | 3 |
| | Recorded: | 11/16/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09156956
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Filing Dt:
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09/18/1998
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Title:
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HIGH-DENSITY PLASMA ETCHING OF CARBON-BASED LOW-K MATERIALS IN A INTEGRATED CIRCUIT
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Assignee
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P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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PATENT COUNSEL
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P.O. BOX 450-A
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SANTA CLARA, CA 95052
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