Patent Assignment Details
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Reel/Frame: | 009910/0336 | |
| Pages: | 3 |
| | Recorded: | 04/14/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09212975
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Filing Dt:
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12/16/1998
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Title:
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CHARGED-PARTICLE-BEAM MASK-BASED EXPOSURE APPARATUS EMPLOYING A VARIABLE MASK-ILLUMINATION FIELD AND ALIGNMENT AND CALIBRATION METHODS THEREFOR
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Assignee
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2-3, MARUNOUCHI 3-CHOME |
FUJI BUILDING |
CHIYODA-KU TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN ET AL
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GREGORY V. BEAN
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ONE WORLD TRADE CENTER
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121 S. W. SALMON STREET
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PORTLAND, OREGON 97024-2988
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