Patent Assignment Details
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Reel/Frame: | 003979/0337 | |
| Pages: | 2 |
| | Recorded: | 03/19/1982 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/14/1986
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Application #:
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06360027
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Filing Dt:
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03/19/1982
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Title:
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RAPID ETCHING METHOD FOR SLICON BY SF6 GAS
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Correspondence name and address
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JOSEPH E. KIENINGER
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IBM PATENT OPERATIONS (951/123)
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5600 COTTLE ROAD
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SAN JOSE, CA 95193
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