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Total properties:
10
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Patent #:
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Issue Dt:
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05/08/1990
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Application #:
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07244786
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Filing Dt:
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09/09/1988
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Title:
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ION BEAM APPARATUS AND METHOD OF MODIFYING SUBSTRATE
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Patent #:
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Issue Dt:
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04/21/1998
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Application #:
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08598081
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Filing Dt:
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02/08/1996
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Title:
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ARRANGEMENT FOR MASKED BEAM LITHOGRAPHY BY MEANS OF ELECTRICALLY CHARGED PARTICLES
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Patent #:
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Issue Dt:
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09/01/1998
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Application #:
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08669481
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Filing Dt:
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09/17/1996
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Title:
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PARTICLE BEAM, IN PARTICULAR IONIC OPTIC IMAGING SYSTEM
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08914070
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Filing Dt:
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08/18/1997
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Title:
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ARRANGEMENT FOR SHADOW-CASTING LITHOGRAPHY
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09363019
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Filing Dt:
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07/29/1999
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Title:
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LITHOGRAPHIC METHOD FOR PRODUCING AN EXPOSURE PATTERN ON A SUBSTRATE
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Patent #:
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Issue Dt:
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01/24/2006
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Application #:
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09375627
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Filing Dt:
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08/17/1999
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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PARTICLE MULTIBEAM LITHOGRAPHY
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09417633
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Filing Dt:
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10/13/1999
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Title:
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PARTICLE-OPTICAL IMAGING SYSTEM FOR LITHOGRAPHY PURPOSES
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09950140
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Filing Dt:
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09/10/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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PATTERN LOCK SYSTEM
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Patent #:
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Issue Dt:
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02/22/2005
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Application #:
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10395572
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Filing Dt:
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03/24/2003
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Publication #:
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Pub Dt:
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09/30/2004
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Title:
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APPARATUS FOR ENHANCING THE LIFETIME OF STENCIL MASKS
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Patent #:
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Issue Dt:
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06/21/2005
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Application #:
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10886463
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Filing Dt:
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07/07/2004
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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ION IRRADIATION OF A TARGET AT VERY HIGH AND VERY LOW KINETIC ION ENERGIES
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