Patent Assignment Details
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Reel/Frame: | 009966/0340 | |
| Pages: | 3 |
| | Recorded: | 05/11/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09236277
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Filing Dt:
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01/22/1999
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Title:
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QUASI-REMOTE PLASMA PROCESSING METHOD AND APPARATUS
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Assignee
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MAIL STOP 525 |
8000 S. FEDERAL WAY |
BOISE, IDAHO 83716 |
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Correspondence name and address
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MICRON TECHNOLOGY, INC.
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CHARLES BRANTLEY
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PATENT DEPT., MAIL STOP 525
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8000 S. FEDERAL WAY
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BOISE, IDAHO 83716
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