Patent Assignment Details
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| Reel/Frame: | 018136/0342 | |
| Pages: | 3 |
| | Recorded: | 07/26/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/15/2008
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Application #:
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11492933
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Filing Dt:
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07/26/2006
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Publication #:
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Pub Dt:
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11/23/2006
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Title:
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POLISHING PAD SURFACE SHAPE MEASURING INSTRUMENT, METHOD OF USING POLISHING PAD SURFACE SHAPE MEASURING INSTRUMENT, METHOD OF MEASURING APEX ANGLE OF CONE OF POLISHING PAD, METHOD OF MEASURING DEPTH OF GROOVE OF POLISHING PAD, CMP POLISHER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignees
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| 11-1, HANEDA-ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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ROBERT J. GAYBRICK
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MORGAN, LEWIS & BOCKIUS LLP
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1111 PENNSYLVANIA AVENUE, N.W.
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WASHINGTON, DC 20004
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