Total properties:
61
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10337510
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Filing Dt:
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01/07/2003
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Publication #:
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Pub Dt:
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07/10/2003
| | | | |
Title:
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SYSTEM AND METHOD FOR AERIAL IMAGE SENSING
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10390806
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Filing Dt:
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03/18/2003
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Publication #:
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Pub Dt:
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12/11/2003
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10646313
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Filing Dt:
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08/22/2003
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Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10677563
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Filing Dt:
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10/02/2003
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Publication #:
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Pub Dt:
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05/20/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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10703732
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Filing Dt:
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11/07/2003
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Publication #:
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Pub Dt:
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06/24/2004
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10755809
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Filing Dt:
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01/12/2004
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Publication #:
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Pub Dt:
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07/22/2004
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
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10/25/2005
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Application #:
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10756718
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Filing Dt:
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01/13/2004
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Publication #:
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Pub Dt:
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07/29/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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10763142
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Filing Dt:
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01/22/2004
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Publication #:
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Pub Dt:
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08/19/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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10763433
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Filing Dt:
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01/23/2004
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Publication #:
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Pub Dt:
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08/05/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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10815573
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Filing Dt:
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04/01/2004
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Publication #:
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Pub Dt:
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04/07/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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10858330
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Filing Dt:
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06/01/2004
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Publication #:
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Pub Dt:
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12/29/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR SYNCHRONIZING DATA ACQUISITION OF A MONITORED IC FABRICATION PROCESS
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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10863915
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Filing Dt:
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06/09/2004
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Publication #:
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Pub Dt:
|
11/11/2004
| | | | |
Title:
|
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
|
11/29/2005
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Application #:
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10873539
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Filing Dt:
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06/21/2004
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Publication #:
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Pub Dt:
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11/25/2004
| | | | |
Title:
|
SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
|
05/10/2005
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Application #:
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10874093
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Filing Dt:
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06/22/2004
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Publication #:
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Pub Dt:
|
11/18/2004
| | | | |
Title:
|
METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
|
07/07/2009
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Application #:
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10917060
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Filing Dt:
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08/12/2004
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Title:
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SYSTEM AND METHOD FOR DETECTING INTEGRATED CIRCUIT PATTERN DEFECTS
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Patent #:
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Issue Dt:
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09/19/2006
|
Application #:
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10981914
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Filing Dt:
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11/04/2004
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Publication #:
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Pub Dt:
|
05/05/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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10989972
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Filing Dt:
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11/16/2004
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Publication #:
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Pub Dt:
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04/28/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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10/03/2006
|
Application #:
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11024121
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Filing Dt:
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12/28/2004
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Publication #:
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Pub Dt:
|
06/02/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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10/03/2006
|
Application #:
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11037988
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Filing Dt:
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01/18/2005
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Publication #:
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Pub Dt:
|
06/09/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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06/19/2007
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Application #:
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11041807
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Filing Dt:
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01/24/2005
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Publication #:
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Pub Dt:
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06/09/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION
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Patent #:
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Issue Dt:
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10/10/2006
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Application #:
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11084484
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Filing Dt:
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03/18/2005
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Publication #:
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Pub Dt:
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07/28/2005
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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05/30/2006
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Application #:
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11212308
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Filing Dt:
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08/25/2005
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Publication #:
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Pub Dt:
|
01/05/2006
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY PROCESS MONITORING AND CONTROL
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Patent #:
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Issue Dt:
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07/21/2009
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Application #:
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11437587
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Filing Dt:
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05/19/2006
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Publication #:
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Pub Dt:
|
12/07/2006
| | | | |
Title:
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SYSTEM AND METHOD FOR CHARACTERIZING AERIAL IMAGE QUALITY IN A LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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12/14/2010
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Application #:
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11437594
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Filing Dt:
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05/19/2006
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Publication #:
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Pub Dt:
|
12/07/2006
| | | | |
Title:
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METHOD FOR DETECTING, SAMPLING, ANALYZING, AND CORRECTING MARGINAL PATTERNS IN INTEGRATED CIRCUIT MANUFACTURING
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Patent #:
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Issue Dt:
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02/10/2009
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Application #:
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11461929
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Filing Dt:
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08/02/2006
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Publication #:
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Pub Dt:
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02/08/2007
| | | | |
Title:
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METHOD FOR LITHOGRAPHY MODEL CALIBRATION
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Patent #:
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Issue Dt:
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06/29/2010
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Application #:
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11461994
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Filing Dt:
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08/02/2006
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Publication #:
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Pub Dt:
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02/08/2007
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Title:
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SYSTEM AND METHOD FOR CREATING A FOCUS-EXPOSURE MODEL OF A LITHOGRAPHY PROCESS
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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11462022
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Filing Dt:
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08/02/2006
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Publication #:
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Pub Dt:
|
02/15/2007
| | | | |
Title:
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SYSTEM AND METHOD FOR MEASURING AND ANALYZING LITHOGRAPHIC PARAMETERS AND DETERMINING OPTIMAL PROCESS CORRECTIONS
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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11466978
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Filing Dt:
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08/24/2006
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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METHOD FOR IDENTIFYING AND USING PROCESS WINDOW SIGNATURE PATTERNS FOR LITHOGRAPHY PROCESS CONTROL
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Patent #:
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Issue Dt:
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01/18/2011
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11527010
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09/26/2006
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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SYSTEM AND METHOD FOR LITHOGRAPHY SIMULATION
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Patent #:
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Issue Dt:
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09/08/2009
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11530402
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Filing Dt:
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09/08/2006
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Publication #:
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Pub Dt:
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03/15/2007
| | | | |
Title:
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SYSTEM AND METHOD FOR MASK VERIFICATION USING AN INDIVIDUAL MASK ERROR MODEL
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11530409
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Filing Dt:
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09/08/2006
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Publication #:
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Pub Dt:
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03/15/2007
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Title:
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METHOD FOR SELECTING AND OPTIMIZING EXPOSURE TOOL USING AN INDIVIDUAL MASK ERROR MODEL
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11670848
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Filing Dt:
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02/02/2007
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Title:
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METHOD FOR PROCESS WINDOW OPTIMIZED OPTICAL PROXIMITY CORRECTION
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02/01/2011
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11757805
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06/04/2007
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Pub Dt:
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12/04/2008
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Title:
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SYSTEM AND METHOD FOR MODEL-BASED SUB-RESOLUTION ASSIST FEATURE GENERATION
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04/27/2010
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11764128
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06/15/2007
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12/18/2008
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04/20/2010
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11838582
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08/14/2007
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Title:
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THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION
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08/16/2011
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11892407
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08/22/2007
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02/26/2009
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Title:
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10/29/2013
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12270498
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11/13/2008
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05/14/2009
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Title:
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METHOD FOR PERFORMING PATTERN DECOMPOSITION FOR A FULL CHIP DESIGN
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06/12/2012
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12315849
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12/05/2008
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06/18/2009
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Title:
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METHODS AND SYSTEM FOR LITHOGRAPHY PROCESS WINDOW SIMULATION
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11/08/2011
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12417559
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04/02/2009
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Pub Dt:
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11/05/2009
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Title:
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10/29/2013
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12475071
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05/29/2009
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12/03/2009
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LENS HEATING COMPENSATION SYSTEMS AND METHODS
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10/29/2013
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12475080
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05/29/2009
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01/14/2010
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Title:
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MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS
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08/12/2014
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12475095
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05/29/2009
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12/03/2009
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Title:
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12/25/2012
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07/24/2009
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Pub Dt:
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01/28/2010
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Title:
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METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING A MODEL BASED COLORING PROCESS FOR GEOMETRY DECOMPOSITION FOR USE IN A MULTIPLE EXPOSURE PROCESS
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05/22/2012
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12567514
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09/25/2009
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04/08/2010
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Title:
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LITHOGRAPHIC PROCESSING METHOD, AND DEVICE MANUFACTURED THEREBY
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05/09/2017
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12608460
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10/29/2009
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06/10/2010
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04/09/2013
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12613221
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11/05/2009
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05/13/2010
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Title:
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METHODS AND SYSTEM FOR LITHOGRAPHY CALIBRATION
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04/08/2014
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12613244
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11/05/2009
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05/13/2010
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Title:
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PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
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05/14/2013
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12613285
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11/05/2009
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06/10/2010
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02/19/2013
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11/06/2009
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10/14/2010
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07/17/2018
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11/09/2009
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01/05/2012
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05/21/2013
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11/24/2009
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05/27/2010
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HARMONIC RESIST MODEL FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
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06/07/2016
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12642436
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12/18/2009
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06/24/2010
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08/07/2012
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12/22/2009
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07/01/2010
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11/15/2011
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02/23/2010
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06/17/2010
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PROCESS WINDOW SIGNATURE PATTERNS FOR LITHOGRAPHY PROCESS CONTROL
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05/20/2014
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12663121
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12/04/2009
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08/12/2010
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METHODS FOR PERFORMING MODEL-BASED LITHOGRAPHY GUIDED LAYOUT DESIGN
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04/02/2013
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12709373
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02/19/2010
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07/15/2010
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METHOD FOR PROCESS WINDOW OPTIMIZED OPTICAL PROXIMITY CORRECTION
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10/16/2012
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12721331
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03/10/2010
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06/24/2010
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MULTIVARIABLE SOLVER FOR OPTICAL PROXIMITY CORRECTION
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01/08/2013
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12721343
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03/10/2010
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06/24/2010
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THREE-DIMENSIONAL MASK MODEL FOR PHOTOLITHOGRAPHY SIMULATION
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09/24/2013
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13003294
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01/07/2011
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PCT #:
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US0949792
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01/06/2015
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13128630
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Filing Dt:
|
05/10/2011
|
Publication #:
|
|
Pub Dt:
|
09/15/2011
| | |
PCT #:
|
US0963798
|
Title:
|
METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DESIGN FOR LITHOGRAPHY CALIBRATION
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/2013
|
Application #:
|
13130548
|
Filing Dt:
|
05/20/2011
|
Publication #:
|
|
Pub Dt:
|
09/22/2011
| | |
PCT #:
|
US0965359
|
Title:
|
FAST FREEFORM SOURCE AND MASK CO-OPTIMIZATION METHOD
|
|