Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009887/0353 | |
| Pages: | 7 |
| | Recorded: | 04/08/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
6
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08804212
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Filing Dt:
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02/21/1997
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Title:
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PLASMA ENCHANCED CHEMICAL METHOD
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Patent #:
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Issue Dt:
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04/13/1999
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Application #:
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08865330
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Filing Dt:
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05/29/1997
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Title:
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METHOD AND APPARATUS FOR CLAMPING A SUBSTRATE
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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08868041
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Filing Dt:
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06/03/1997
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Title:
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ELECTROSTATIC SUPPORT ASSEMBLY HAVING AN INTEGRAL ION FOCUS RING
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08971316
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Filing Dt:
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11/17/1997
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Title:
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PLASMA GENERATING APPARATUS HAVING AN ELECTROSTATIC SHIELD
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09075854
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Filing Dt:
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05/11/1998
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Title:
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METHOD OF PLANARIZING A SEMICONDUCTOR DEVICE USING A HIGH DENSITY PLASMA SYSTEM
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09092565
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Filing Dt:
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06/05/1998
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Title:
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PLASMA ENHANCED CHEMICAL PROCESSING REACTOR AND METHOD
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Assignee
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| 2881 SCOTT BLVD. |
| SANTA CLARA, CALIFORNIA 95050 |
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Correspondence name and address
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COOLEY GODWARD LLP
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WILLIS E. HIGGINS
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FIVE PALO ALTO SQUARE
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3000 EL CAMINO REAL
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PALO ALTO, CA 94306
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