Patent Assignment Details
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Reel/Frame: | 016780/0354 | |
| Pages: | 3 |
| | Recorded: | 07/14/2005 | | |
Conveyance: | CORRECTED COVER SHEET TO CORRECT 1ST AND 2ND INVENTOR'S NAME, PREVIOUSLY RECORDED AT REEL/FRAME 016080/0480 (ASSIGNMENT OF ASSIGNOR'S INTEREST) |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10927095
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Filing Dt:
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08/27/2004
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Publication #:
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Pub Dt:
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03/02/2006
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Title:
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Wafer processing apparatus capable of controlling wafer temperature
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Assignees
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6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU |
TOKYO, JAPAN |
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24-14, NISHINBASHI 1-CHOME |
MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 NORTH 17TH STREET - SUITE 1800
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ARLINGTON, VA 22209
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