Patent Assignment Details
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Reel/Frame: | 055552/0354 | |
| Pages: | 8 |
| | Recorded: | 03/10/2021 | | |
Attorney Dkt #: | 47460-00121 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/18/2023
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Application #:
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17197654
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Filing Dt:
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03/10/2021
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Publication #:
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Pub Dt:
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09/16/2021
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Title:
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In Situ Monitoring of Field-Effect Transistors During Atomic Layer Deposition
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Assignee
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633 CLARK STREET |
EVANSTON, ILLINOIS 60208 |
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Correspondence name and address
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BENESCH, FRIEDLANDER, COPLAN & ARONOFF LLP
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200 PUBLIC SQUARE, SUITE 2300
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CLEVELAND, OH 44114
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09/24/2024 05:52 PM
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