Patent Assignment Details
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Reel/Frame: | 032575/0359 | |
| Pages: | 3 |
| | Recorded: | 04/01/2014 | | |
Attorney Dkt #: | APPM/15357US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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13281989
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Filing Dt:
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10/26/2011
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Publication #:
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Pub Dt:
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05/03/2012
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Title:
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METHODS FOR REDUCING PHOTORESIST INTERFERENCE WHEN MONITORING A TARGET LAYER IN A PLASMA PROCESS
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON + SHERIDAN, LLP
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3040 POST OAK BOULEVARD
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SUITE 1500
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HOUSTON, TX 77056
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