Patent Assignment Details
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| Reel/Frame: | 013189/0361 | |
| Pages: | 5 |
| | Recorded: | 08/14/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10133963
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Filing Dt:
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04/25/2002
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Publication #:
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Pub Dt:
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01/02/2003
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Title:
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PROJECTION EXPOSURE SYSTEM AS WELL AS A PROCESS FOR COMPENSATING IMAGE DEFECTS OCCURRING IN THE PROJECTION OPTICS OF A PROJECTION EXPOSURE SYSTEM, IN PARTICULAR FOR MICROLITHOGRAPHY
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Assignee
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| 885 THIRD AVE., SUITE 2900 |
| NEW YORK, NEW YORK 10022-4838 |
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Correspondence name and address
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FACTOR & PARTNERS, LLC
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JODY L. FACTOR
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1327 W. WASHINGTON BLVD.
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SUITE 5G/H
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CHICAGO, IL 60607
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