Patent Assignment Details
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| Reel/Frame: | 046091/0362 | |
| Pages: | 3 |
| | Recorded: | 06/14/2018 | | |
| Attorney Dkt #: | 2857.6020001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/04/2018
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Application #:
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15683126
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Filing Dt:
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08/22/2017
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Publication #:
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Pub Dt:
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03/01/2018
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Title:
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Metrology Apparatus for Measuring a Structure Formed on a Substrate by a Lithographic Process, Lithographic System, and Method of Measuring a Structure Formed on a Substrate by a Lithographic Process
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Assignee
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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