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Reel/Frame:020614/0364   Pages: 7
Recorded: 03/03/2008
Conveyance: RE-RECORD TO CORRECT FIRST INVENOTR NAME PREVIOUSLY RECORDED AT R/F 017283/0222
Total properties: 1
1
Patent #:
Issue Dt:
04/22/2008
Application #:
11226460
Filing Dt:
09/15/2005
Publication #:
Pub Dt:
03/15/2007
Title:
POSITION MEASUREMENT UNIT, MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH POSITION MEASUREMENT UNIT
Assignors
1
Exec Dt:
02/20/2008
2
Exec Dt:
02/20/2008
Assignee
1
DE RUN 6501, NL-5504 DR
VELDHOVEN, NETHERLANDS
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN LLP
P.O. BOX 10500
1650 TYSONS BOULEVARD
MCLEAN, VA 22102

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