Total properties:
10
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10194526
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIROMENTS
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Patent #:
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Issue Dt:
|
08/17/2004
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Application #:
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10290138
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Filing Dt:
|
11/06/2002
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Title:
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VERTICAL MOS TRANSISTOR
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Patent #:
|
|
Issue Dt:
|
06/07/2005
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Application #:
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10640892
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Filing Dt:
|
08/14/2003
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Publication #:
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Pub Dt:
|
02/17/2005
| | | | |
Title:
|
SENSOR ARRAY FOR MEASURING PLASMA CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
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Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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10815124
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Filing Dt:
|
03/31/2004
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Publication #:
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Pub Dt:
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10/06/2005
| | | | |
Title:
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Techniques for packaging and encapsulating components of diagnostic plasma measurement devices
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|
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Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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10875954
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Filing Dt:
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06/24/2004
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Publication #:
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|
Pub Dt:
|
12/29/2005
| | | | |
Title:
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Diagnostic plasma measurement device having patterned sensors and features
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Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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10933167
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Filing Dt:
|
09/02/2004
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Publication #:
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|
Pub Dt:
|
03/02/2006
| | | | |
Title:
|
Electrically floating diagnostic plasma probe with ion property sensors
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10951084
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Filing Dt:
|
09/27/2004
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Publication #:
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|
Pub Dt:
|
02/24/2005
| | | | |
Title:
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Wafer probe for measuring plasma and surface characteristics in plasma processing enviroments
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|
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Patent #:
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|
Issue Dt:
|
03/20/2007
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Application #:
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10951162
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Filing Dt:
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09/27/2004
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Publication #:
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|
Pub Dt:
|
02/17/2005
| | | | |
Title:
|
WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11047256
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Filing Dt:
|
01/31/2005
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Publication #:
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|
Pub Dt:
|
08/03/2006
| | | | |
Title:
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Diagnostic plasma sensors for endpoint and end-of-life detection
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|
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Patent #:
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|
Issue Dt:
|
10/01/2013
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Application #:
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11066520
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Filing Dt:
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02/25/2005
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Publication #:
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|
Pub Dt:
|
07/14/2005
| | | | |
Title:
|
SENSOR ARRAY FOR MEASURING PLASMA CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
|
|