Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 023305/0366 | |
| Pages: | 2 |
| | Recorded: | 09/17/2009 | | |
| Attorney Dkt #: | AI-705 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12585552
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Filing Dt:
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09/17/2009
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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Method of etching sacrificial layer, method of manufacturing MEMS device, MEMS device and MEMS sensor
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Assignee
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| 21, SAIIN MIZOSAKI-CHO, UKYO-KU, KYOTO-SHI |
| KYOTO, JAPAN 615-8585 |
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Correspondence name and address
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ROBERT H. BERDO, JR.
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RABIN & BERDO, PC
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1101 14TH STREET, NW, SUITE 500
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WASHINGTON, D.C. 20005
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