Patent Assignment Details
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| Reel/Frame: | 038911/0366 | |
| Pages: | 3 |
| | Recorded: | 06/14/2016 | | |
| Attorney Dkt #: | 24061.3347US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/13/2018
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Application #:
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15182160
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Filing Dt:
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06/14/2016
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Publication #:
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Pub Dt:
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11/02/2017
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Title:
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Extreme Ultraviolet Lithography with Reduced Exposure Dose and Negative Tone Development
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Assignee
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| NO. 8, LI-HSIN ROAD 6, |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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Correspondence name and address
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HAYNES AND BOONE, LLP IP SECTION
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2323 VICTORY AVENUE
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SUITE 700
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DALLAS, TX 75219
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